Thin film thickness measurement using electron probe microanalyzer

Li-bo, Zhuang; Bao, Shengxiang; Wang, Rong; Li, Shilan; Ma, Lili; D, Lv

doi:10.1109/asemd.2009.5306671

Cited by 9 publications

(4 citation statements)

References 7 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The results were compared with other investigation techniques to evaluate its accuracy. Thickness results have an uncertainty of about 9% which is consistent with the data from literature obtained from calibration curves using real standards [38]. The three metals chosen for the coating had largely different characteristic X-ray emissions as they had different atomic numbers.…”

Section: Discussionsupporting

confidence: 84%

X-ray Microanalysis of Precious Metal Thin Films: Thickness and Composition Determination

2018

View full text Add to dashboard Cite

Abstract:Measuring the thickness and the composition of precious metal thin films is a challenging task. Currently, the available techniques for thickness measurements are either destructive or need heavy assumptions on the nature of the sample, relying on information that are not always available with sufficient accuracy. In this paper we propose a new methodology based on X-ray microanalysis that can complement, with better lateral resolution, the use of X-ray Fluorescence, the most widely employed technique for measuring the thickness of electrodeposited coatings. The proposed method employs a combination of energy dispersive microanalysis spectra acquisition and Monte Carlo simulation. The effectiveness of the technique has been demonstrated by the measure of the thickness and the composition of a thin 24 kt gold electroplated film that contained small amount of nickel. Results have been validated by comparing data with those obtained by X-ray fluorescence and the scanning electron microscopy of metallographic cross-sections.

show abstract

Section: Discussionsupporting

confidence: 84%

X-ray Microanalysis of Precious Metal Thin Films: Thickness and Composition Determination

2018

View full text Add to dashboard Cite

show abstract

“…The approach was validated by the analysis of electrodeposited plates with known metal thickness using various approaches and custom-made software. The results were compared with other techniques showing an uncertainty of 9%, which is consistent with the literature data obtained using real standards [133]. The method has been validated on copper-based substrates covered by a layer of gold-nickel alloy.…”

Section: Real Thickness Determinationsupporting

confidence: 76%

Electroplating for Decorative Applications: Recent Trends in Research and Development

et al. 2018

View full text Add to dashboard Cite

Electroplating processes are widely employed in industrial environments for a large variety of metallic coatings, ranging from technological to decorative applications. Even if the galvanic electrodeposition is certainly a mature technology, new concepts, novel applications, environmental legislation and the new material requirements for next-generation devices make the scientific research in this field still very active. This review focuses mostly at the decorative and wearable applications, and aims to create a bridge between the past knowledge and the future direction that this process, i.e., electrodeposition, is taking. Both the theoretical fundamentals as well as some of the most widespread practical applications-limited to metallic and alloy coatings-are explored. As an integral part of the industrial process, we take a look at the main techniques thought which the quality control of deposits and surfaces is carried out. Finally, global industrial performance and research directions towards sustainable solutions are highlighted.

show abstract

“…The elemental composition of a given material can be obtained from its EDS spectra [98]. As the detected energy intensity depends on the initial electron beam energy and the average volume of the droplet-shaped interaction region, EDS may also be employed to estimate the film thickness [70,[99][100][101][102]. Most authors use the relation I f /I s ∼ d, where I s (I f ) is the peak intensity of the substrate (film), to obtain the thickness.…”

Section: Appendix B: Sem/eds Characterizationmentioning

confidence: 99%

Magnetic flux penetration in nanoscale wedge-shaped superconducting thin films

et al. 2022

View full text Add to dashboard Cite

Thickness uniformity is regarded as an important parameter in designing thin film devices. However, some applications based on films with nonuniform thickness have recently emerged, such as gas sensors and optimized materials based on the gradual change of film composition. This work deals with superconducting Pb thin films with a thickness gradient prepared with the aid of a diffuse stencil mask. Atomic force microscopy and energydispersive x-ray spectroscopy show variations in the range 90 nm-154 nm. Quantitative magneto-optical images reveal interesting features during both the abrupt and the smooth penetration regimes of magnetic flux, as well as the thickness-dependent critical current density (J c ). In addition, we observe a gradual superconducting transition as the upper critical field is progressively reached for certain thicknesses. Furthermore, the hysteresis observed for triggering flux avalanches when increasing and decreasing magnetic fields is also accounted for by the J c profile evolution along the thickness gradient. Numerical simulations based on the thermomagnetic model are in fair agreement with the experimental data. These findings demonstrate that wedge-shaped films are a viable approach to investigate, in a continuous fashion, thickness-dependent properties of superconducting materials.

show abstract

Thin film thickness measurement using electron probe microanalyzer

Cited by 9 publications

References 7 publications

X-ray Microanalysis of Precious Metal Thin Films: Thickness and Composition Determination

X-ray Microanalysis of Precious Metal Thin Films: Thickness and Composition Determination

Electroplating for Decorative Applications: Recent Trends in Research and Development

Magnetic flux penetration in nanoscale wedge-shaped superconducting thin films

Contact Info

Product

Resources

About