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The article contains sections titled: 1. Preparation of Thin Films 1.1. Chemical Vapor Deposition Processes 1.2. Plasma Polymerization 1.3. Physical Vapor Deposition (PVD) Processes 1.3.1. Sputter Deposition 1.3.2. Evaporation Deposition 1.3.3. Deposition of Metals, Alloys, and Compounds 1.4. Thin Film Growth by Molecular Beam Epitaxy (MBE) 1.4.1. Introduction 1.4.2. The Configuration of MBE Growth Systems 1.4.3. Monitoring Facilities 1.5. Thin Films by Adsorption Processes 1.5.1. Self‐Assembled Monolayers 1.5.2. Self‐Assembled Multilayers 1.6. Langmuir ‐ Blodgett and Related Techniques 1.6.1. Low Molecular Mass Substances 1.6.2. Polymeric Amphiphilic LB Layers 1.6.3. Hairy Rod Polymers 1.7. Electrochemical Deposition Processes 1.7.1. Scope 1.7.2. Electrochemical Deposition of Metals and Alloys 1.7.3. Electrophoretic Coatings 1.7.4. Trends in Electrodeposition 2. Thin Films as Materials 2.1. Coatings for Electronic Applications 2.1.1. Introduction 2.1.2. Hybrid Technology 2.1.3. Microsystems 2.1.4. Data Storage 2.1.5. Microelectronics 2.1.6. Semiconducting Films 2.1.7. Ferroelectrics 2.2. Hard and Decorative Nitride and Carbide Coatings 2.2.1. Introduction 2.2.2. Growth Techniques 2.2.3. Coating Microstructures 2.2.4. Adhesion 2.2.5. Hard Coatings 2.3. Carbon Films 2.3.1. Carbon Phases: Composition and Stability 2.3.2. Properties and Applications of Diamond Films 2.3.3. Properties and Applications of a‐C : H, a‐C, and ta‐C Films 2.4. Metallic Films 2.4.1. Introduction 2.4.2. Electronics Applications 2.4.3. Engineering Coatings 2.4.4. Dispersed Catalytic Coatings 2.4.5. Developments and Trends 2.5. Superconductive Coatings 2.6. Polymer Films 2.6.1. Langmuir ‐ Blodgett Layers of Polymer Films as Materials 2.6.2. Films by Plasma Polymerization 2.7. Optical Coatings 2.7.1. Introduction 2.7.2. Theory 2.7.3. Deposition Methods 2.7.4. Coating Materials 2.7.5. Classical Coatings 2.7.6. Nonclassical Coatings 2.7.7. Applications 2.8. Membranes 2.8.1. Introduction 2.8.2. Fundamentals 2.8.3. Membrane Structures and their Preparation
The article contains sections titled: 1. Preparation of Thin Films 1.1. Chemical Vapor Deposition Processes 1.2. Plasma Polymerization 1.3. Physical Vapor Deposition (PVD) Processes 1.3.1. Sputter Deposition 1.3.2. Evaporation Deposition 1.3.3. Deposition of Metals, Alloys, and Compounds 1.4. Thin Film Growth by Molecular Beam Epitaxy (MBE) 1.4.1. Introduction 1.4.2. The Configuration of MBE Growth Systems 1.4.3. Monitoring Facilities 1.5. Thin Films by Adsorption Processes 1.5.1. Self‐Assembled Monolayers 1.5.2. Self‐Assembled Multilayers 1.6. Langmuir ‐ Blodgett and Related Techniques 1.6.1. Low Molecular Mass Substances 1.6.2. Polymeric Amphiphilic LB Layers 1.6.3. Hairy Rod Polymers 1.7. Electrochemical Deposition Processes 1.7.1. Scope 1.7.2. Electrochemical Deposition of Metals and Alloys 1.7.3. Electrophoretic Coatings 1.7.4. Trends in Electrodeposition 2. Thin Films as Materials 2.1. Coatings for Electronic Applications 2.1.1. Introduction 2.1.2. Hybrid Technology 2.1.3. Microsystems 2.1.4. Data Storage 2.1.5. Microelectronics 2.1.6. Semiconducting Films 2.1.7. Ferroelectrics 2.2. Hard and Decorative Nitride and Carbide Coatings 2.2.1. Introduction 2.2.2. Growth Techniques 2.2.3. Coating Microstructures 2.2.4. Adhesion 2.2.5. Hard Coatings 2.3. Carbon Films 2.3.1. Carbon Phases: Composition and Stability 2.3.2. Properties and Applications of Diamond Films 2.3.3. Properties and Applications of a‐C : H, a‐C, and ta‐C Films 2.4. Metallic Films 2.4.1. Introduction 2.4.2. Electronics Applications 2.4.3. Engineering Coatings 2.4.4. Dispersed Catalytic Coatings 2.4.5. Developments and Trends 2.5. Superconductive Coatings 2.6. Polymer Films 2.6.1. Langmuir ‐ Blodgett Layers of Polymer Films as Materials 2.6.2. Films by Plasma Polymerization 2.7. Optical Coatings 2.7.1. Introduction 2.7.2. Theory 2.7.3. Deposition Methods 2.7.4. Coating Materials 2.7.5. Classical Coatings 2.7.6. Nonclassical Coatings 2.7.7. Applications 2.8. Membranes 2.8.1. Introduction 2.8.2. Fundamentals 2.8.3. Membrane Structures and their Preparation
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