1991
DOI: 10.1007/bf02747357
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Thin films of Y-Ba-Cu-O by rf sputtering and study of Josephson effect

Abstract: Thin films of Y-Ba Cu-O material have been prepared by rf diode sputtering using a single oxide target on strontium titanate substrates kept at an ambient temperature. It was found difficult to attain stoichiometry of the films identical to that of the target due to resputtering of the films. The influence of sputtering parameters such as target-substrate distance, rf power, gas pressure and substrate temperature in attaining a particular stoichiometry of the film has been studied. The I-V characteristics of t… Show more

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“…In both papers, no real evidence for negative ion bombardment is given, but the authors refer to similarity for YBCO targets with a preferential loss of Ba. Hirata et al [234] illustrates a barium deficiency in barium for YBa [235].…”
Section: Compositional Changesmentioning
confidence: 99%
“…In both papers, no real evidence for negative ion bombardment is given, but the authors refer to similarity for YBCO targets with a preferential loss of Ba. Hirata et al [234] illustrates a barium deficiency in barium for YBa [235].…”
Section: Compositional Changesmentioning
confidence: 99%