Thin Injection-Molded Substrate for High Density Recording Phase-Change  Rewritable Optical Disk

Ohta, Takeo; Inoue, Kazuo; Ishida, Takao; Gotoh, Yutaka; Satoh, Isao

doi:10.1143/jjap.32.5214

Cited by 26 publications

(4 citation statements)

References 2 publications

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“…Among the various hot-embossing processes, injection-compression molding (ICM) is one of the lowest cost and highest throughput techniques [ 5 , 6 , 7 ]. Nagato [ 8 ] demonstrated the fabrication of replica molds for UV-NIL by ICM, which is a proven technique for molding optical disks, such as compact disks (CDs), digital versatile disks (DVDs), and Blu-ray disks (BDs) with low cost and high throughput [ 9 , 10 ]. However, this process has several disadvantages, such as warpage, material shrinkage, and unevenness.…”

Section: Introductionmentioning

confidence: 99%

Study of a Compression-Molding Process for Ultraviolet Light-Emitting Diode Exposure Systems via Finite-Element Analysis

Hwang

Lee

2017

Sensors

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Although wafer-level camera lenses are a very promising technology, problems such as warpage with time and non-uniform thickness of products still exist. In this study, finite element simulation was performed to simulate the compression molding process for acquiring the pressure distribution on the product on completion of the process and predicting the deformation with respect to the pressure distribution. Results show that the single-gate compression molding process significantly increases the pressure at the center of the product, whereas the multi-gate compressing molding process can effectively distribute the pressure. This study evaluated the non-uniform thickness of product and changes in the process parameters through computer simulations, which could help to improve the compression molding process.

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Section: Introductionmentioning

confidence: 99%

Study of a Compression-Molding Process for Ultraviolet Light-Emitting Diode Exposure Systems via Finite-Element Analysis

Hwang

Lee

2017

Sensors

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“…In this paper, I propose and demonstrate the fabrication of replica molds for UV-NIL by injection compression molding (ICM), which is a proven technique for molding optical disks such as compact disks (CDs), digital versatile disks (DVDs), and Blu-ray disks (BDs) with low cost and high throughput [7][8][9]. ICM is one of the lowest cost and highest throughput processes among hot-embossing processes [10][11][12].…”

Section: Introductionmentioning

confidence: 99%

Injection Compression Molding of Replica Molds for Nanoimprint Lithography

Nagato

2014

Polymers

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As a breakthrough in the cost and durability of molds for nanoimprint lithography (NIL), replica molds are fabricated by injection compression molding (ICM). ICM is commonly used for optical disks such as DVDs or Blu-ray disks and is also a practical fabrication method for nanostructures. In this paper, I successfully demonstrated the fabrication of cycloolefin polymer replica molds with structures smaller than 60 nm by ICM. Furthermore, ultraviolet (UV)-NIL using these replica molds was demonstrated. UV-cured resist was replicated over an area of 60 mm diameter. The degree of replication by UV-NIL in the first usage of each replica mold had good repeatability. Because ICM is a high-throughput, low-cost process, the replica mold can be disposed of after a certain time for UV-NIL. This method leads to a high-integrity UV-NIL process of patterned media because multiple large-area replica molds can be fabricated simultaneously.

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“…13,14 In this technique, a thin cavity can be easily filled with a polymer when a high pressure is applied to the polymer surface by mold compression. In injection molding, a preheated and melted polymer is injected into a mold cavity.…”

Section: Introductionmentioning

confidence: 99%

Injection compression molding of high-aspect-ratio nanostructures

Nagato

Hamaguchi

Nakao

2011

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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Assessment of release properties in UV nanoimprint lithography using high-aspect-ratio nanoscale molds J. Vac. Sci. Technol. B 28, C6M23 (2010); 10.1116/1.3503896Fabrication of high density, high-aspect-ratio polyimide nanofilters Fabrication of metal-based high-aspect-ratio microscale structures by compression moldingHigh-aspect-ratio nanostructures were replicated by injection compression molding. The effects of the mold temperature and pattern shape on the degree of replication were investigated using a replication technique for optical disks (digital versatile disks) and a Ni stamper with patterns with a width and height of 200 and 400 nm. A higher mold temperature and a smaller area-duty ratio (hill area/unit area) of the Ni stamper, i.e., a larger area-duty ratio of the replica resulted in better replication because a Ni stamper with a smaller area-duty ratio suppresses the formation of a skin layer.

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Thin Injection-Molded Substrate for High Density Recording Phase-Change Rewritable Optical Disk

Cited by 26 publications

References 2 publications

Study of a Compression-Molding Process for Ultraviolet Light-Emitting Diode Exposure Systems via Finite-Element Analysis

Study of a Compression-Molding Process for Ultraviolet Light-Emitting Diode Exposure Systems via Finite-Element Analysis

Injection Compression Molding of Replica Molds for Nanoimprint Lithography

Injection compression molding of high-aspect-ratio nanostructures

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