Thin nanocrystalline diamond films deposited by LaPlas-CVD at atmospheric pressure

Abstract

In this study possibilities are presented how a laser plasma CVD process (LaPlas) can be modified in order to generate nanocrystalline diamonds. With the LaPlas process it is possible to deposit diamond coatings on surfaces. It can be shown that the crystallite size can be modified towards smaller grains. The crystallite size was reduced below 1 lm. An applied cutting force test of some coatings shows the resulting performance.