Thin plasma-polymerized layers of hexamethyldisiloxane for humidity sensor development

Guermat, Noubeil; Bellel, A.; Sahli, S.; Ségui, Y.; Raynaud, Patrice

doi:10.1016/j.tsf.2009.01.084

Cited by 25 publications

(21 citation statements)

References 35 publications

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“…In fact, numerous reports in the literature have implicitly made use of the hydration of such nominally hydrophobic HMDSO coatings . For example, Saulou et al have shown that composite materials consisting of a pp‐HMDSO matrix with embedded silver nanoparticles act as anti‐microbial coatings.…”

Section: Resultsmentioning

confidence: 99%

“…HMDSO is widely used as a starting molecule for plasma polymers because it has a suitable vapor pressure at ambient conditions, is relatively non‐toxic and is commercially easily available. Numerous reports on its use in applications including pervaporation membranes, barrier coatings for controlled release of molecules, humidity sensors, biocompatible coatings, and anti‐bacterial nanosilver‐composite materials have been published . These examples suggest that plasma polymerized HMDSO films are stable in water and that (at least to some extent) water penetrates into these hydrophobic films (i.e., film hydration is possible).…”

Section: Introductionmentioning

confidence: 99%

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Densification and Hydration of HMDSO Plasma Polymers

Blanchard

Hanselmann

Drosten

et al. 2014

Plasma Processes & Polymers

101

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Plasma polymer films were deposited from hexamethyldisiloxane (HMDSO) in a low-pressure discharge. The influence of the energetic conditions in the gas phase as well as at the surface on the densification/cross-linking of the hydrophobic films was studied. The fragmentation of the monomer in the plasma seems to be of similar importance for film densification as the energetic particle interactions at the surface. A map of fragmentation chemical pathways can thus be proposed for HMDSO. The aging and hydration of the HMDSO films were studied and hydration history effects related to the energetic conditions applied in the plasma process were observed. Effective water penetration was possible as evidenced by silver release studies.

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Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Densification and Hydration of HMDSO Plasma Polymers

Blanchard

Hanselmann

Drosten

et al. 2014

Plasma Processes & Polymers

101

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“…An important feature of the FTIR spectra (Figure ) is the observed spectral shift to higher wavenumbers of the main band SiOSi (P4) after the O 2 and SF 6 plasma modification of the pp‐HMDSO thin film surface, where this shift is higher in sample S‐SF 6 than in sample S‐O 2 . Generally, this feature may indicate a change of film morphology, a decrease in film density, when accompanied with full width at a half maximum (FWHM) decrease of the peak, and a stronger cross‐linking of the film, as illustrated in Figure . The observed shoulder in the peak of sample S‐SF 6 may be due to new overlapped peaks with the SiOSi band such as CF x and SiF x , indicating an incorporation of fluorine atoms in the SF 6 plasma–treated pp‐HMDSO thin film structure.…”

Section: Resultsmentioning

confidence: 72%

Effect of surface modification on the properties of plasma‐polymerized hexamethyldisiloxane thin films

Saloum

Shaker

Alkafri

et al. 2019

Surface & Interface Analysis

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Plasma‐polymerized hexamethyldisiloxane (pp‐HMDSO) thin films have been deposited in a radiofrequency (RF) remote plasma‐enhanced chemical vapor deposition (PECVD) system, on different types of substrates: silicon wafers, glass, quartz crystals, and chemiresistor structure. The as‐grown thin films have been post treated in two types of reactive plasmas produced in SF6 and O2 gases. The effect of this surface modification on different properties of the as‐grown pp‐HMDSO thin film (chemical structure, elemental composition, surface morphology, film density and thickness, optical bandgap, and electrical resistivity) has been investigated. It is found that SF6 plasma and O2 plasma surface modifications of the as‐grown pp‐HMDSO thin film induce property changes different from each other. SF6 plasma converted the as‐grown pp‐HMDSO film to a more porous material and caused a narrowing of its optical band gap of about 33%, while O2 plasma induced a lowering of film electrical resistivity of about two orders of magnitude.

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“…Thin sensitive coatings were elaborated using plasma enhanced chemical vapor deposition (PECVD) technique [6]. The films were deposited in low frequency plasma reactor from HMDSO diluted with different proportion of oxygen (0%, 50% and 80 %).…”

Section: A Qcm Coatingmentioning

confidence: 99%

“…Where: Xm is the hidden layer neuron value Eqs (5) and Y n is the output layer neuron value Eqs (6) .��"':":: …”

Section: Identification and Quantification Of Gases By Annmlpmentioning

confidence: 99%

Quantitative gas identification using HMDSO coated QCM sensors and multilayer neural networks

Boutamine¹,

Bellel²,

Sahli

et al. 2013

3rd International Conference on Systems and Control

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Quartz crystal microbalance (QCM) electrodes were coated from a mixture of hexamethyldisiloxane (HMDSO) and O2 for the detection of volatile organic compounds (VOCs).The sensitivity of the coated QCM-based sensors was evaluated by monitoring the frequency shifts of the quartz exposed to different concentrations of volatile organic compounds (VOCs), such as; ethanol, benzene and chloroform. The sensors responses data have been used in subsequent data processing step for quantitative gas identification. It was shown that, with varying oxygen proportion in the mixture, the sensitivity and the selectivity of the QCM sensor towards on a given analyte change. Several multivariable analysis techniques, with varying degrees of success for automated identification of VOCs such as; linear method: principal component analysis (PCA) and nonlinear method: Artificial neural networks multilayer perceptions (ANNMLP) have been used to explore the data in this study. The collected data processed by principal component analysis has identified ethanol compared to the other two gases. The artificial neural networks multilayer perception after training has allowed the identification of 100% of these three types of VOCs and estimated their concentration, which demonstrates the success of nonlinear methods for identification and quantification of gas using this type of sensors

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Thin plasma-polymerized layers of hexamethyldisiloxane for humidity sensor development

Cited by 25 publications

References 35 publications

Densification and Hydration of HMDSO Plasma Polymers

Densification and Hydration of HMDSO Plasma Polymers

Effect of surface modification on the properties of plasma‐polymerized hexamethyldisiloxane thin films

Quantitative gas identification using HMDSO coated QCM sensors and multilayer neural networks

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