Thin WBx and WyTi1−yBx films deposited by combined magnetron sputtering and pulsed laser deposition technique

Chrzanowska-Giżyńska, Justyna; Denis, Piotr; Giżyński, Maciej; Kurpaska, Ł.; Mihăilescu, I. N.; Szymański, Z.; Mościcki, Tomasz

doi:10.1016/j.apsusc.2019.02.006

Cited by 17 publications

(10 citation statements)

References 33 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In addition, resputtering of atoms from surface deposited coatings is also possible. A decrease in light elements was already observed in References [18,32]. The boron content B/(Zr + W) is in the range of 1.54-2.06 (see Table 2) which means boron decrease of 38.4-17.7 % respectively compared to the target composition.…”

Section: Coatingsmentioning

confidence: 62%

Properties of Spark Plasma Sintered Compacts and Magnetron Sputtered Coatings Made from Cr, Mo, Re and Zr Alloyed Tungsten Diboride

et al. 2021

Self Cite

View full text Add to dashboard Cite

To enhance the properties of tungsten diboride, we have synthesized and characterized solid solutions of this material with chromium, molybdenum, rhenium and zirconium. The obtained materials were subsequently deposited as coatings. Various concentrations of these transition metal elements, ranging from 0.0 to 24.0 at.%, on a metals basis, were made. Spark plasma sintering was used to synthesize these refractory compounds from the pure elements. Elemental and phase purity of both samples (sintered compacts and coatings) were examined using energy dispersive X-ray spectroscopy and X-ray diffraction. Microindentation was utilized to measure the Vickers hardness. X-ray diffraction results indicate that the solubility limit is below 8 at.% for Mo, Re and Zr and below 16 at.% for Cr. Above this limit both diborides (W,TM)B2 are created. Addition of transition metals caused decrease of density and increase of hardness and electrical conductivity of sintered compacts. Deposited coatings W1−xTMxBy (TM = Cr, Mo, Re, Zr; x = 0.2; y = 1.7–2) are homogenous, smooth and hard. The maximal hardness was measured for W-Cr-B films and under the load of 10 g was 50.4 ± 4.7 GPa. Deposited films possess relatively high fracture toughness and for WB2 coatings alloyed with zirconium it is K1c = 2.11 MPa m1/2.

show abstract

Section: Coatingsmentioning

confidence: 62%

Properties of Spark Plasma Sintered Compacts and Magnetron Sputtered Coatings Made from Cr, Mo, Re and Zr Alloyed Tungsten Diboride

et al. 2021

Self Cite

View full text Add to dashboard Cite

show abstract

“…Thin film deposition techniques have been applied in numerous fields, like electronics, coatings, packaging, or photovoltaic cells, using different methods such as sol-gel, hydrothermal synthesis, electrochemical methods, spray coating, spin coating, physical/chemical vapor deposition, laser-based techniques, or evaporation [ 14 , 15 , 16 , 17 , 18 , 19 , 20 ]. Most of these methods are predominantly related to the deposition of inorganic compounds as thin layers on different surfaces, being less applicable for generating organic substrates.…”

Section: Introductionmentioning

confidence: 99%

Surface Modification Using MAPLE Technique for Improving the Mechanical Performance of Adhesive Joints

et al. 2023

View full text Add to dashboard Cite

The adhesive bonds that ensure the appropriate mechanical properties for metal joining imply the surface chemical and wetting modification characteristics of the substrates. In this work, matrix-assisted pulsed laser evaporation (MAPLE) was used for the surface modification of Al via the deposition of two chemical compounds, polyvinyl alcohol (PVA) and triethanolamine (TEA), from frozen aqueous solutions. The deposition of the TEA and PVA layers was evidenced by FT-IR, SEM, and AFM analysis. The contact angle measurements evidenced the change in the hydrophilicity of the surface and surface free energies. The performance of the commercial silyl-based polymer adhesive Bison Max Repair Extreme Adhesive® was evaluated by tensile strength measurements. This method led to a change in tensile strength of 54.22% in the case of Al-TEA and 36.34% for Al-PVA compared with the control. This study gives preliminary insights into using MAPLE, for the first time in adhesive applications, as a pretreatment method for Al plates for adhesive bonding reinforcement.

show abstract

“…Further, this hybrid was recently explored in growing Zn-Au films, where Au was found to be uniformly incorporated throughout the film without structural alteration to the crystallographic Wurzite feature of the ZnO [10]. More recently, Chrzanowska-Gi ży ńskaa et al used a similar hybrid system of PLD and RFMS to deposit superhard coatings of tungsten boride [16]. This hybrid system has uniquely combined the highly energetic UV laser plasma (up to 1 keV) with that of the low-energy RF magnetron plasma (up to several eV); therefore, the combination, together with the geometrical features of RFMS inside the PLD system, offers flexibility in designing nanoheterostructures with properties suited for gas sensing applications [17].…”

Section: Introductionmentioning

confidence: 99%

Optimization of Pulsed Laser Ablation and Radio-Frequency Sputtering Tandem System for Synthesis of 2D/3D Al2O3-ZnO Nanostructures: A Hybrid Approach to Synthesis of Nanostructures for Gas Sensing Applications

et al. 2023

View full text Add to dashboard Cite

In this paper, a unique hybrid approach to design and synthesize 2D/3D Al2O3-ZnO nanostructures by simultaneous deposition is presented. Pulsed laser deposition (PLD) and RF magnetron sputtering (RFMS) methods are redeveloped into a single tandem system to create a mixed-species plasma to grow ZnO nanostructures for gas sensing applications. In this set-up, the parameters of PLD have been optimized and explored with RFMS parameters to design 2D/3D Al2O3-ZnO nanostructures, including nanoneedles/nanospikes, nanowalls, and nanorods, among others. The RF power of magnetron system with Al2O3 target is explored from 10 to 50 W, while the ZnO-loaded PLD’s laser fluence and background gases are optimized to simultaneously grow ZnO and Al2O3-ZnO nanostructures. The nanostructures are either grown via 2-step template approach, or by direct growth on Si (111) and MgO<0001> substrates. In this approach, a thin ZnO template/film was initially grown on the substrate by PLD at ~300 °C under ~10 milliTorr (1.3 Pa) O2 background pressure, followed by growth of either ZnO or Al2O3-ZnO, using PLD and RFMS simultaneously under 0.1–0.5 Torr (13–67 Pa), and Ar or Ar/O2 background in the substrate temperate range of 550–700 °C. Growth mechanisms are then proposed to explain the formation of Al2O3-ZnO nanostructures. The optimized parameters from PLD-RFMS are then used to grow nanostructures on Au-patterned Al2O3-based gas sensor to test its response to CO gas from 200 to 400 °C, and a good response is observed at ~350 °C. The grown ZnO and Al2O3-ZnO nanostructures are quite exceptional and remarkable and have potential applications in optoelectronics, such in bio/gas sensors.

show abstract

Thin WBx and WyTi1−yBx films deposited by combined magnetron sputtering and pulsed laser deposition technique

Cited by 17 publications

References 33 publications

Properties of Spark Plasma Sintered Compacts and Magnetron Sputtered Coatings Made from Cr, Mo, Re and Zr Alloyed Tungsten Diboride

Properties of Spark Plasma Sintered Compacts and Magnetron Sputtered Coatings Made from Cr, Mo, Re and Zr Alloyed Tungsten Diboride

Surface Modification Using MAPLE Technique for Improving the Mechanical Performance of Adhesive Joints

Optimization of Pulsed Laser Ablation and Radio-Frequency Sputtering Tandem System for Synthesis of 2D/3D Al2O3-ZnO Nanostructures: A Hybrid Approach to Synthesis of Nanostructures for Gas Sensing Applications

Contact Info

Product

Resources

About