Thinned Backside Illuminated Ccds For Ultraviolet, Soft X-Ray And Electron-Beam Imaging

Tassin, C.; Thenoz, Y.; Lemaitre, Regine; Chabbal, Jean

doi:10.1117/12.961814

SPIE Proceedings

1989

DOI: 10.1117/12.961814

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Thinned Backside Illuminated Ccds For Ultraviolet, Soft X-Ray And Electron-Beam Imaging

C. Tassin

Y. Thenoz

Regine Lemaitre

et al.

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Cited by 5 publications

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Progress in UV soft X-ray imaging

Schirmann¹,

Bocher²,

Breton³

et al. 1992

Laser Part. Beams

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Soft X-ray imaging detection is usually made by using 101-01, 101-07, or SA1 Kodak films. Recent progress in thinned CCD fabrication allows us now to replace films by thinned CCDs to detect UV soft X-ray light with an enhanced sensitivity. We developed a thinned CCD system, and to demonstrate its applicability to replace photographic films we tested it behind a broad spectral range soft X-ray transmission grating spectrometer and a soft X-ray Mo/Si multilayer mirror telescope. Soft X-ray spectra and soft X-ray pictures of laser-created plasma are presented using these instruments implemented with a thinned CCD readout.

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Progress in UV soft X-ray imaging

Schirmann¹,

Bocher²,

Breton³

et al. 1992

Laser Part. Beams

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show abstract

Self-calibration of a thinned, backside illuminated charge coupled devices in the soft x-ray region

Tsakiris

Sigel

1995

Review of Scientific Instruments

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A semiempirical method of calibrating a thinned, backside illuminated charge coupled device (CCD) chip in the soft x-ray region is presented. It is based on determining the thickness of the dead layer self-consistently using the continuum emission from laser produced plasmas. The CCD camera system was coupled to a transmission grating spectrometer and recorded the spectrally resolved continuum emission from laser irradiated tungsten targets. The thickness of the dead layer was then determined by comparing the experimental spectra with the calculated quantum efficiency for a thinned CCD using a simplified model. In this way the CCD chip was semiempirically calibrated. The accuracy of the calibration in the soft x-ray range was assessed by comparing the CCD recorded spectra with those recorded by a spectrometer using the absolutely calibrated Kodak 101 photographic plates and a similar transmission grating. Based on this calibration, the CCD sensitivity is deduced to be about two orders of magnitude higher than that of the Kodak plates in this wavelength range.

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Calibration of charge coupled devices and a pinhole transmission grating to be used as elements of a soft x-ray spectrograph

Schriever

Lebert

Naweed

et al. 1997

Review of Scientific Instruments

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The development of new types of sophisticated soft x-ray sources requires the knowledge of their emission characteristics such as photon flux, spectral distribution, and size of the radiation source. Calibrated spectrographs for the soft x-ray region are needed to determine these properties. The components of a soft x-ray spectrograph consisting of a pinhole gold transmission grating and a charge coupled device (CCD) camera are calibrated at the radiometry laboratory of the Physikalisch-Technische Bundesanstalt using the synchrotron radiation facility BESSY. Two different kinds of CCD-based photon detectors (one thinned and back illuminated, one coated with a phosphorous layer) are compared with regard to their sensitivities in the spectral range between 50 eV and 1.7 keV. The results obtained for the thinned CCD are compared with theoretical calculations of the sensitivity

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Thinned Backside Illuminated Ccds For Ultraviolet, Soft X-Ray And Electron-Beam Imaging

Cited by 5 publications

References 1 publication

Progress in UV soft X-ray imaging

Progress in UV soft X-ray imaging

Self-calibration of a thinned, backside illuminated charge coupled devices in the soft x-ray region

Calibration of charge coupled devices and a pinhole transmission grating to be used as elements of a soft x-ray spectrograph

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