Thomson scattering measurements of electron temperature and density in an electron cyclotron resonance plasma

Bowden, Mark; Okamoto, Tsuyoshi; Kimura, Fumio; Muta, Hiroshi; Uchino, Kenji; Muraoka, Katsunori; Sakoda, Tatsuya; Maeda, Mitsuo; Manabe, Yoshio; Kitagawa, Masatoshi; Kimura, Tadashi

doi:10.1063/1.353046

Cited by 82 publications

(52 citation statements)

References 16 publications

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“…[14][15][16][17][18][19][20] LTS experiments in microdischarges are challenging because of the low signal and excessive stray light. LTS has been widely used for diagnostics of high temperature, high density plasmas, 12,13 as well as low pressure nonequilibrium discharges.…”

Section: Measurement Of Electron Temperature and Density In An Argon mentioning

confidence: 99%

Measurement of electron temperature and density in an argon microdischarge by laser Thomson scattering

Belostotskiy

Khandelwal

Wang

et al. 2008

Applied Physics Letters

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Articles you may be interested inElectron density and temperature measurement by continuum radiation emitted from weakly ionized atmospheric pressure plasmas Appl. Phys. Lett. 104, 084103 (2014); 10.1063/1.4866804Density of atoms in Ar*(3p54s) states and gas temperatures in an argon surfatron plasma measured by tunable laser spectroscopy Gas temperature and electron density profiles in an argon dc microdischarge measured by optical emission spectroscopy

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Section: Measurement Of Electron Temperature and Density In An Argon mentioning

confidence: 99%

Measurement of electron temperature and density in an argon microdischarge by laser Thomson scattering

Belostotskiy

Khandelwal

Wang

et al. 2008

Applied Physics Letters

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“…2. The Thomson scattering system was arranged in the plane perpendicular to the chamber axis, and is shown schematically in Fig.…”

Section: A Ecr Apparatus and Thomson Scattering Systemmentioning

confidence: 99%

“…Laser Thomson scattering was applied as a diagnostic method for analyzing electron behavior in the ECR plasma. In previous Thomson scattering experiments, 2 it was shown that the signal-to-noise ratio that can be obtained is sufficient to measure electron densities down to less than 10 17 m Ϫ3 , and that the method is nondisturbing to the plasma and unambiguous in the interpretation of the results, compared with electric probe methods. 3 A new laser Thomson scattering system that has enabled spatial profiles of the electron density and temperature to be measured was constructed.…”

Section: Introductionmentioning

confidence: 99%

Spatial distributions of electron temperature and density in electron cyclotron resonance discharges

Cronrath

Bowden

Uchino

et al. 1997

Journal of Applied Physics

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Articles you may be interested inInfluence of microwave driver coupling design on plasma density at Testbench for Ion sources Plasma Studies, a 2.45 GHz Electron Cyclotron Resonance Plasma Reactor Rev. Sci. Instrum. 85, 033310 (2014); 10.1063/1.4869343 Electron-temperature control in 915 MHz electron cyclotron resonance plasma Effect of discharge microwave frequency on electron temperature of electron cyclotron resonance plasma Rev. Sci. Instrum. 72, 1666 (2001); 10.1063/1.1347972 Multicomponent consideration of electron fraction of electron-cyclotron resonance source plasma Rev. Sci. Instrum. 71, 850 (2000)Electron cyclotron resonance ion source ionic currents (both in the stable and periodic regimes) modeled in relation with the hot electron temperature via the potential dip Rev.Spatial profiles of electron density and temperature of electron cyclotron resonance discharge plasmas have been successfully measured using laser Thomson scattering. The results, thus obtained, were valuable for quantitative comparison with results of a computer simulation. Measurements were performed for two cases with different locations of the electron cyclotron resonance zones. Simulation results obtained from a hybrid code, which treats ions and neutral particles as discrete particles and electrons as a fluid, were fitted to the experimental profiles of the electron density and temperature by adjusting the microwave power deposition profiles. From these comparisons and an analysis of other simulation data, it was found that the large difference of radial electron density profiles for two discharge conditions was caused by the difference of radial space-charge electric-field distributions. The radial electron temperature distribution determined the radial electric field that drove the ions radially and also resulted in a peaked electron density profile for one case and a more uniform profile for the other case. It is also shown that Coulomb collisions of electrons with ions as well as electron-neutral collisions are important for the analysis of electron behavior along the magnetic field lines.

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“…TS is employed to determine the electron density n e and temperature T e with good spatial resolution [8][9][10][11][12][13][14][15]. Rayleigh scattering gives us spatially resolved heavy particle temperature T g [16][17][18][19].…”

Section: Introductionmentioning

confidence: 99%

Atmospheric microwave-induced plasmas in Ar/H₂ mixtures studied with a combination of passive and active spectroscopic methods

Palomares¹,

Iordanova²,

Gamero³

et al. 2010

J. Phys. D: Appl. Phys.

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Several active and passive diagnostic methods have been used to study atmospheric microwave induced plasmas created by a surfatron operating at a frequency of 2.45 GHz and with power values between 57 and 88 W. By comparing the results with each other, insight is obtained into essential plasma quantities, their radial distributions and the reliability of the diagnostic methods. Two laser techniques have been used, namely Thomson scattering (TS) for the determination of the electron density, n e , and temperature, T e , and Rayleigh scattering (RyS) for the determination of the heavy particle temperature, T g . In combination, three passive spectroscopic techniques are applied, the line broadening of the H β line to determine n e , and two methods of absolute intensity measurements to obtain n e and T e . The active techniques provide spatial resolution in small plasmas with sizes in the order of 0.5 mm. The results of n e measured with three different methods show good agreement, independent of the plasma settings. The T e values obtained with two techniques are in good agreement for the condition of a pure argon plasma, but they show deviations when H 2 is introduced. The introduction of a small amount (0.3 %) of H 2 into an argon plasma induces contraction, reduces n e , increases T e , enhances the departure from equilibrium and leads to conditions that are close to those found in cool atmospheric plasmas.

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Thomson scattering measurements of electron temperature and density in an electron cyclotron resonance plasma

Cited by 82 publications

References 16 publications

Measurement of electron temperature and density in an argon microdischarge by laser Thomson scattering

Measurement of electron temperature and density in an argon microdischarge by laser Thomson scattering

Spatial distributions of electron temperature and density in electron cyclotron resonance discharges

Atmospheric microwave-induced plasmas in Ar/H₂ mixtures studied with a combination of passive and active spectroscopic methods

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Thomson scattering measurements of electron temperature and density in an electron cyclotron resonance plasma

Cited by 82 publications

References 16 publications

Measurement of electron temperature and density in an argon microdischarge by laser Thomson scattering

Measurement of electron temperature and density in an argon microdischarge by laser Thomson scattering

Spatial distributions of electron temperature and density in electron cyclotron resonance discharges

Atmospheric microwave-induced plasmas in Ar/H2 mixtures studied with a combination of passive and active spectroscopic methods

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Atmospheric microwave-induced plasmas in Ar/H₂ mixtures studied with a combination of passive and active spectroscopic methods