2021
DOI: 10.1016/j.cirp.2021.04.069
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Three-axial cutting force measurement in micro/nano-cutting by utilizing a fast tool servo with a smart tool holder

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Cited by 22 publications
(6 citation statements)
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“…However, this method changes the original components of the machine tool, and the supporting measurement system is expensive and has poor promotion performance. Chen et al [96] developed an intelligent toolholder composed of a piezoelectric ceramic force sensor and a flexible hinge, which can be integrated with a fast tool servo for three-way cutting force measurement in micro/nano cutting. The cutting test results show that the intelligent toolholder has a force measurement resolution of 0.1 mN, 0.05 mN, and 0.1 mN in the X, Y, and Z directions, and can sensitively detect tiny chatter with an amplitude of 20 nm.…”
Section: Piezoelectric Detection Technologymentioning
confidence: 99%
“…However, this method changes the original components of the machine tool, and the supporting measurement system is expensive and has poor promotion performance. Chen et al [96] developed an intelligent toolholder composed of a piezoelectric ceramic force sensor and a flexible hinge, which can be integrated with a fast tool servo for three-way cutting force measurement in micro/nano cutting. The cutting test results show that the intelligent toolholder has a force measurement resolution of 0.1 mN, 0.05 mN, and 0.1 mN in the X, Y, and Z directions, and can sensitively detect tiny chatter with an amplitude of 20 nm.…”
Section: Piezoelectric Detection Technologymentioning
confidence: 99%
“…However, this method changes the original components of the machine tool, and the supporting measurement system is expensive and has poor promotion performance. Chen et al [96] developed an intelligent toolholder composed of a piezoelectric ceramic force sensor and a flexible hinge, which can be integrated with a fast tool servo for three-way cutting force measurement in micro/nano cutting. The cutting test results show that the intelligent toolholder has a force measurement resolution of 0.1 mN, 0.05 mN, and 0.1 mN in the X, Y, and Z directions, and can sensitively detect tiny chatter with an amplitude of 20 nm.…”
Section: Piezoelectric Detection Technologymentioning
confidence: 99%
“…In practical applications of ultra-precision machining, semiconductor industry and biomechanics field, there are many cases where it is necessary to measure static or quasistatic micro forces by force sensors, such as constant cutting force machining and measuring machining forces in real time for monitoring the machining status [14,15], micro constant force servo for surface measurement [5], sensing and positioning based on force signal [7,9], etc. The force gauge based on the principle of strain gauge can measure static force [16], but its sensitivity and stiffness are much lower than the piezoelectric sensor so that the application of the piezoelectric sensor could not be replaced by the commercial force gauge.…”
Section: Introductionmentioning
confidence: 99%