2021
DOI: 10.1109/jmems.2021.3101735
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Three-Axis Capacitive Sensor Arrays for Local and Global Shear Force Detection

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Cited by 23 publications
(7 citation statements)
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“…This type of sensor can provide comprehensive and accurate mechanical information that equals to or even exceeds human tactility (1,2). Meanwhile, recognition of multipoint pressure distribution by sensor array allows us to obtain a complete pressure interaction profile (3)(4)(5), and complemented by artificial intelligence and data analytics, researchers already show the feasibility of more intelligent sensing functions such as grasping recognition (6)(7)(8) and slip detection (2,9). In addition, the thin and lightweight sensor form is also essential, as this contributes to the feasibility and flexibility of system-level integration (10)(11)(12).…”
Section: Introductionmentioning
confidence: 99%
“…This type of sensor can provide comprehensive and accurate mechanical information that equals to or even exceeds human tactility (1,2). Meanwhile, recognition of multipoint pressure distribution by sensor array allows us to obtain a complete pressure interaction profile (3)(4)(5), and complemented by artificial intelligence and data analytics, researchers already show the feasibility of more intelligent sensing functions such as grasping recognition (6)(7)(8) and slip detection (2,9). In addition, the thin and lightweight sensor form is also essential, as this contributes to the feasibility and flexibility of system-level integration (10)(11)(12).…”
Section: Introductionmentioning
confidence: 99%
“…Tactile sensors can play a major role in providing force feedback from surgical instruments to the surgeon. The working of tactile force sensors, presented in the literature, is based on different transduction mechanisms including capacitive [10], [11], piezoresistive [12], [13], piezoelectric [14], [15], magnetic [16], [17], and optical [18], [19]. The capacitive tactile force sensors allow to achieve high sensitivity and resolution but are easily susceptible to parasitic capacitance and noise from nearby equipment and materials.…”
Section: Introductionmentioning
confidence: 99%
“…[18] The triaxial force sensors have been prepared based on different sensing mechanisms, mainly including of piezoelectric, [19] piezoresistive, [20,21] and capacitive. [22,23] Piezoresistive strain gauge triaxial force sensors have been widely studied due to good stability and sensitivity. [24,25] However, the limitations of rigid silicon and complicated fabrication process hinder its application in largearea production and curved surface.…”
Section: Introductionmentioning
confidence: 99%