Three-axis piezoresistive accelerometer with adjustable axial resolutions

Hang, Bui Thu; Tran, Duc–Tan; Trinh, Chu Duc

doi:10.15625/0866-7136/34/1/427

Cited by 2 publications

(3 citation statements)

References 11 publications

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“…To eliminate this effect, the position of piezo-resistors should have a certain distance from the ends. Therefore, the relative change of piezo-resistors can be expressed as [ 15 , 21 ]:

…”

Section: Modeling Piezo-resistive Eight-beam Three-axis Acceleromementioning

confidence: 99%

“…Hang et al developed an accelerometer made of a heavy proof-mass and four long beams to obtain high resolutions by reducing the resonance frequency. Electronics sensitivity and frequency responses were modeled [ 21 ]. Liu et al presented a theoretical model of a high-g accelerometer as a crossed clamped-clamped Timoshenko beam with a lumped moment of inertia at the free end.…”

Section: Introductionmentioning

confidence: 99%

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A Mathematical Model of a Piezo-Resistive Eight-Beam Three-Axis Accelerometer with Simulation and Experimental Validation

Song

Wang

et al. 2018

Sensors

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A mathematical model of a sensor is vital to deeply comprehend its working principle and implement its optimal design. However, mathematical models of piezo-resistive eight-beam three-axis accelerometers have rarely been reported. Furthermore, those works are largely focused on the analysis of sensing acceleration in the normal direction, rather than in three directions. Therefore, a complete mathematical model of a piezo-resistive eight-beam three-axis accelerometer is developed in this paper. The validity of the mathematical model is proved by a Finite Element Method (FEM) simulation. Furthermore, the accelerometer is fabricated and tested. The prime sensitivities of X, Y and Z axes are 0.209 mV/g, 0.212 mV/g and 1.247 mV/g at 160 Hz, respectively, which is in accord with the values obtained by the model. The reason why the prime sensitivity SZZ is bigger than SXX and SYY is explained. Besides, it is also demonstrated why the cross-sensitivities SXZ and SYZ exceed SZX and SZY. Compared with the FEM model, the developed model could be helpful in evaluating the performance of three-axis accelerometers in an accurate and rapid way.

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“…To eliminate this effect, the position of piezo-resistors should have a certain distance from the ends. Therefore, the relative change of piezo-resistors can be expressed as [ 15 , 21 ]:

…”

Section: Modeling Piezo-resistive Eight-beam Three-axis Acceleromementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

A Mathematical Model of a Piezo-Resistive Eight-Beam Three-Axis Accelerometer with Simulation and Experimental Validation

Song

Wang

et al. 2018

Sensors

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show abstract

“…where k B = 1.38 × 10 -23 J/K is Boltzmann's constant, T is the resistor temperature, R is the resistance value of the piezoresistor, and B is the measured bandwidth B i = f imax -f imin . The bandwidth can be determined by many parameters such as the sampling frequency, analog filtering, the resonant frequency of the mechanical structure, or losses in the wires, etc [21].…”

Section: Figure 6: Piezoresistance Factor P(n T ) As a Function Of Imentioning

confidence: 99%

Constrained Optimum Design of 3-DOF Microaccelerometers

Tran

Huynh

Roy

et al. 2014

IETE Journal of Research

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This paper presents a technique to optimize with constraints, the performance of three-degree of freedom silicon accelerometers. A flexure configuration has been proposed in order to meet requirements of small cross-axial acceleration, high and linear sensitivity. The overall chip dimension is 1.5×1.5×0.5 mm 3 (L×W×T) and the beam size is 950×80×10 µm 3 (L×W×T). The purpose of this constrained optimization process is to achieve the highest sensitivity or resolution while imposing conditions on other parameters. It has been done based on considerations of the junction depth, the doping concentration of the piezoresistor, the temperature, the Signal to Noise Ratio, and the power consumption. Such an optimized accelerometer offers a much better performance compared to others.

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Three-axis piezoresistive accelerometer with adjustable axial resolutions

Cited by 2 publications

References 11 publications

A Mathematical Model of a Piezo-Resistive Eight-Beam Three-Axis Accelerometer with Simulation and Experimental Validation

A Mathematical Model of a Piezo-Resistive Eight-Beam Three-Axis Accelerometer with Simulation and Experimental Validation

Constrained Optimum Design of 3-DOF Microaccelerometers

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