Three-degree-of-freedom ultrasonic motor using a 5-mm-diameter piezoelectric ceramic tube

Guo, Mingsen; Hu, Junhui; Zhu, Hua; Zhao, Chunsheng; Dong, Shuxiang

doi:10.1109/tuffc.2013.2716

Cited by 33 publications

(16 citation statements)

References 20 publications

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“…Guo et al [46] designed a 3-DOF actuator by using a 5 mm diameter piezoelectric ceramic tube, as shown in Fig. 4(a), with XY outputs obtained with a driving torque of 3.6 μN•m and motion speed of 21.8 rps.…”

Section: Aerospace Engineeringmentioning

confidence: 99%

See 1 more Smart Citation

A Review of Application and Development Trends in Ultrasonic Motors

Li¹,

Wen²,

Jia³

et al. 2020

ES Mater. Manuf.

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The structure and performance of ultrasonic motors have gradually improved with the emergence of new materials, techniques, and structural forms. Therefore, the application scope of this technology is also expanding, especially in the field of high-end equipment. This paper conducts a review of research on the application status and progress at the frontier of research on ultrasonic motors. A summary and classification of both the status of application and cutting-edge research progress are presented, including the use of ultrasonic motors in aerospace, precision, biomedical and optical engineering and the influence on ultrasonic motor design resulting from the breakthrough in advanced processing and preparation technology, structural and functional integration technology, low voltage drives and open-loop control systems. Moreover, the performance of products developed with the aid of ultrasonic motors and representative devices are compared; and state of the art ultrasonic motor designs are discussed and summarized. Finally, potential future research efforts and prospects are highlighted.

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Section: Aerospace Engineeringmentioning

confidence: 99%

“…(c) (b) (a) Fig.4. The ultrasonic motors used for the precision motion stage: (a)structure of the prototype motor [46];…”

Section: Aerospace Engineeringmentioning

confidence: 99%

A Review of Application and Development Trends in Ultrasonic Motors

Li¹,

Wen²,

Jia³

et al. 2020

ES Mater. Manuf.

View full text Add to dashboard Cite

show abstract

“…It is driven by the first longitudinal and second bending vibration modes. The motor performance was improved through a simple piezoelectric lead zirconatetitanate (PZT)-tube stator [9]. Wang, et al, proposed a novel two-DOF spherical ultrasonic motor with three traveling-wave type annular stators to improve the tolerance and controllability of multi-free ultrasonic motors [10].…”

Section: Introductionmentioning

confidence: 99%

Design and Analysis of Electromagnetic-Piezoelectric Hybrid Driven Three-Degree-of-Freedom Motor

Guo

Wang

et al. 2020

Sensors

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Multi-DOF movement actuators are widely used in industry, mainly in the fields of bionics and precision machining. With the non-stop improvement of modern-day industry, the requirements for the precision, integration and flexibility of multi-degree-of-freedom motion actuators in the industrial field have progressively increased. This paper presents a novel electromagnetic–piezoelectric hybrid driven three-degree-of-freedom motor. The driving method of the hybrid drive motor can be divided into electromagnetic driving and piezoelectric driving. The motor structure and working principle are analyzed. The structural parameters are obtained by modal analysis of the stators and rotor. The rationality of the stator structure is proved by using the transient analysis of the piezoelectric stators. The magnetic field characteristics of the motor are analyzed by both analytical method and the finite element method. The contact pressure and displacement between the piezoelectric stator and the rotor are analyzed by the analytical method. A motor drive model is established, which provides the basis for motor optimization design and control. Finally, a motor prototype and its test platform were built, and the experimental results are presented to verify the rationality of the motor design.

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“…The multi-degree-of-freedom (multi-DOF) motor has more flexible motion compared to the single-DOF motor [7][8][9]. Nowadays, many structures which can realize rotary and linear motion and screw-type motion have been studied.…”

Section: Introductionmentioning

confidence: 99%

A Novel Impact Rotary–Linear Motor Based on Decomposed Screw-Type Motion of Piezoelectric Actuator

Han

Pan

et al. 2018

Applied Sciences

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A novel impact two-degree-of-freedom (2-DOF) motor based on the decomposed screw-type motion of a piezoelectric actuator (PA) has been proposed. The fabricated prototype motor has a maximum diameter of 15 mm and a length of 100 mm which can produce a maximum torsional angle of about 1000 μrad and a maximum longitudinal displacement of about 1.03 μm under a saw-shaped driving voltage with 720 Vp-p (peak-to-peak driving voltage). When the axial prepressure generated by the spring is about 1N and the radial prepressure generated by the snap ring is about 14 N, the fabricated motor realizes rotary motion with the driving frequency from 200 Hz to 4 kHz. When the axial prepressure generated by the spring is about 11.7 N and the radial prepressure generated by the snap ring is about 21.1 N, the fabricated motor realizes linear motion with the driving frequency from 2 kHz to 11 kHz. In the experiments, the prototype motor can achieve 9.9 × 105 μrad/s rotary velocity at 2 kHz and it can achieve 2.4 mm/s linear velocity at 11 kHz under the driving voltage of 720 Vp-p.

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Three-degree-of-freedom ultrasonic motor using a 5-mm-diameter piezoelectric ceramic tube

Cited by 33 publications

References 20 publications

A Review of Application and Development Trends in Ultrasonic Motors

A Review of Application and Development Trends in Ultrasonic Motors

Design and Analysis of Electromagnetic-Piezoelectric Hybrid Driven Three-Degree-of-Freedom Motor

A Novel Impact Rotary–Linear Motor Based on Decomposed Screw-Type Motion of Piezoelectric Actuator

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