Three-Dimensional Atom-Probe Tomographic Studies of Nickel Monosilicide/Silicon Interfaces on a Subnanometer Scale

Adusumilli, Praneet; Murray, Conal E.; Lauhon, Lincoln J.; Avayu, Ori; Rosenwaks, Y.; Seidman, David N.

doi:10.1149/1.3118957

Cited by 9 publications

(6 citation statements)

References 40 publications

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“…The computational results are in agreement with the 3D atom probe measurements by Sonehara et al showing localized Pt distributions both at the silicide surface and at the silicide/Si interface [16]. They are also consistent with a computed reduction of the silicide/Si interfacial free energy by segregated Pt [15].…”

Section: Segregation Of Ptsupporting

confidence: 90%

“…An interesting experimental technique to address the spatial distribution of an element on the atomic level in a material is atom probe tomography. Local electrode (3D) atom probe measurements have indeed been carried out on Pt together with other dopants (Pd [15], As and B [16]) in Ni 1-x Pt x Si silicide films. It was found that Pt atoms segregates to the silicide/Si interface.…”

Section: Introductionmentioning

confidence: 99%

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Formation of nickel-platinum silicides on a silicon substrate: Structure, phase stability, and diffusion from ab initio computations

Christensen¹,

Eyert²,

Freeman³

et al. 2013

Journal of Applied Physics

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The formation of Ni(Pt)silicides on a Si(001) surface is investigated using an ab initio approach.After deposition of a Ni overlayer alloyed with Pt, the calculations reveal fast diffusion of Ni atoms into the Si lattice, which leads initially to the formation of Ni 2 Si. At the same time Si atoms are found to diffuse into the metallic overlayer. The transformation of Ni 2 Si into NiSi is likely to proceed via a vacancy-assisted diffusion mechanism. Silicon atoms are the main diffusing species in this transformation, migrating from the Si substrate through the growing NiSi layer into the Ni 2 Si. Pt atoms have a low solubility in Ni 2 Si and prefer Si-sites in the NiSi lattice, thereby stabilizing the NiSi phase. The diffusivity of Pt is lower than that of Ni. Furthermore, Pt atoms have a tendency to segregate to interfaces, thereby acting as diffusion barriers.

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Section: Segregation Of Ptsupporting

confidence: 90%

Section: Introductionmentioning

confidence: 99%

Formation of nickel-platinum silicides on a silicon substrate: Structure, phase stability, and diffusion from ab initio computations

Christensen¹,

Eyert²,

Freeman³

et al. 2013

Journal of Applied Physics

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“…We briefly describe the atom probe process in the SI. Further descriptions of APT analysis and techniques are available in the literature. ,, For data collection, we use a LEAP4000XSi atom probe tomograph manufactured by CAMECA. , The sharpened tips are cryogenically cooled inside the LEAP instrument to a temperature of about 44 K. Atoms from the surface of the sharp tip are field-evaporated by applying a high voltage in the range 3–6 kV. Field-evaporation is assisted by ultraviolet laser pulses with 30 pJ pulse energy and a 250 kHz pulse repetition rate.…”

Section: Experimental Sectionmentioning

confidence: 99%

Dendritic Oxide Growth in Zerovalent Iron Nanofilms Revealed by Atom Probe Tomography

Boamah¹,

Isheim

Geiger

2018

J. Phys. Chem. C

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Atom probe tomography (APT) analysis of chemically pure nanofilms of zero-valent iron (Fe(0), or ZVI) and their thermal oxide nano-overlayers reveals the presence of dendritic iron oxide features that extend from the oxide nano-overlayer surface into the ZVI bulk. The dendrites are observed by APT to be in the 5 nm x 10 nm size range and form quickly under natural atmospheric conditions. Their growth into the ZVI lalyer is, within the limit of our threemonth long study, self-limiting (i.e. their initial growth appears to quickly discontinue). The atomistic views presented here shed first light on the atmospheric corrosion process of Fe(0)bearing engineered nanostructures and their surfaces in the limit of low bulk impurities. Possible roles of the newly identified oxidized iron dendrites are also discussed in the context of passivation processes limiting technological applications of Fe(0).

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“…The combination of APT and TEM represents a powerful route to study the distributions of different species at an internal heterophase interface. 32 We have exploited these capabilities to study the mechanism of 1-D NB formation during volume-confined oxidation. We utilized Si as a marker atom to follow the structural evolution leading to the 1-D NB array, taking advantage of the difference in oxidation kinetics of Si vs Ge.…”

mentioning

confidence: 99%

“…ppm in concentration) is challenging using energy-dispersive X-ray spectroscopy (EDS) and/or electron energy-loss spectroscopy (EELS). The combination of APT and TEM represents a powerful route to study the distributions of different species at an internal heterophase interface . We have exploited these capabilities to study the mechanism of 1-D NB formation during volume-confined oxidation.…”

mentioning

confidence: 99%

1-D Metal Nanobead Arrays within Encapsulated Nanowires via a Red-Ox-Induced Dewetting: Mechanism Study by Atom-Probe Tomography

et al. 2017

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Metal nanoparticle arrays are excellent candidates for a variety of applications due to the versatility of their morphology and structure at the nanoscale. Bottom-up self-assembly of metal nanoparticles provides an important complementary alternative to the traditional top-down lithography method and makes it possible to assemble structures with higher-order complexity, for example, nanospheres, nanocubes, and core-shell nanostructures. Here we present a mechanism study of the self-assembly process of 1-D noble metal nanoparticles arrays, composed of Au, Ag, and AuAg alloy nanoparticles. These are prepared within an encapsulated germanium nanowire, obtained by the oxidation of a metal-germanium nanowire hybrid structure. The resulting structure is a 1-D array of equidistant metal nanoparticles with the same diameter, the so-called nanobead (NB) array structure. Atom-probe tomography and transmission electron microscopy were utilized to investigate the details of the morphological and chemical evolution during the oxidation of the encapsulated metal-germanium nanowire hybrid-structures. The self-assembly of nanoparticles relies on the formation of a metal-germanium liquid alloy and the migration of the liquid alloy into the nanowire, followed by dewetting of the liquid during shape-confined oxidation where the liquid column breaks-up into nanoparticles due to the Plateau-Rayleigh instability. Our results demonstrate that the encapsulating oxide layer serves as a structural scaffold, retaining the overall shape during the eutectic liquid formation and demonstrates the relationship between the oxide mechanical properties and the final structural characteristics of the 1-D arrays. The mechanistic details revealed here provide a versatile tool-box for the bottom-up fabrication of 1-D arrays nanopatterning that can be modified for multiple applications according to the RedOx properties of the material system components.

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Three-Dimensional Atom-Probe Tomographic Studies of Nickel Monosilicide/Silicon Interfaces on a Subnanometer Scale

Cited by 9 publications

References 40 publications

Formation of nickel-platinum silicides on a silicon substrate: Structure, phase stability, and diffusion from ab initio computations

Formation of nickel-platinum silicides on a silicon substrate: Structure, phase stability, and diffusion from ab initio computations

Dendritic Oxide Growth in Zerovalent Iron Nanofilms Revealed by Atom Probe Tomography

1-D Metal Nanobead Arrays within Encapsulated Nanowires via a Red-Ox-Induced Dewetting: Mechanism Study by Atom-Probe Tomography

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