2013
DOI: 10.1002/adom.201300323
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Three Dimensional Chiral Metamaterial Nanospirals in the Visible Range by Vertically Compensated Focused Ion Beam Induced‐Deposition

Abstract: Fabrication and characterization of chiral metallic nanospirals for application as metamaterials in the visible and near infrared range are described. The structures consist of platinum helicoidal three‐dimensional nanostructures realized by focused ion beam induced‐deposition, where the interaction with incident light can be controlled as a function of light circular polarization state and spectral region, showing a circular dichroism across a wide range of optical wavelengths. An accurate size control and na… Show more

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Cited by 118 publications
(87 citation statements)
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“…The FIBID technique was already demonstrated to be a powerful tool for manufacturing 3D chiral structures at the nanoscale 22 ; however, the realization of intertwined helical structures by FIBID presents two additional technological challenges. One is the difficulty to extrude the nanowires in the third dimension because of the presence of blind spots (that is, the space occupied by the elements already grown).…”
Section: Resultsmentioning
confidence: 99%
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“…The FIBID technique was already demonstrated to be a powerful tool for manufacturing 3D chiral structures at the nanoscale 22 ; however, the realization of intertwined helical structures by FIBID presents two additional technological challenges. One is the difficulty to extrude the nanowires in the third dimension because of the presence of blind spots (that is, the space occupied by the elements already grown).…”
Section: Resultsmentioning
confidence: 99%
“…The FIBID beam and pattern parameters were optimized following the procedure reported in ref. 22, where is also described the dose compensation procedure used to strongly reduce the 3D proximity effects that, for the THN growth, was further implemented by using a continuous gradient function for dose correction. For the subsequent beam scan, the same pattern is repeated anticlockwise rotating by 60°, thus inducing the deposition of the arches arranged every 120°(indicated in Fig.…”
Section: Resultsmentioning
confidence: 99%
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“…9 Till now, circular polarizers based on helix structures are still believed as the broadest circular polarizer's candidates. 10 Various special fabrication process are proposed besides direct laser writing, such as focused ion beam induced-deposition (FIBID), 11 on-edge lithography (OEL), 12 glancing angle deposition (GLAD), 13 tomographic rotatory growth (TRG) 10 and so on. However, none of the above fabrication methods is compatible with other linear polarizer units' fabrication process to integrate on a chip, which is usually electron beam lithography or conventional lithographic techniques.…”
Section: Introductionmentioning
confidence: 99%