2011
DOI: 10.1002/sca.20262
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Three‐dimensional electron microscopy simulation with the CASINO Monte Carlo software

Abstract: Monte Carlo softwares are widely used to understand the capabilities of electron microscopes. To study more realistic applications with complex samples, 3D Monte Carlo softwares are needed. In this paper, the development of the 3D version of CASINO is presented. The software feature a graphical user interface, an efficient (in relation to simulation time and memory use) 3D simulation model, accurate physic models for electron microscopy applications, and it is available freely to the scientific community at th… Show more

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Cited by 295 publications
(200 citation statements)
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“…This fraction, collected by the upper electrode, is 30%-40% (for the lower electrode, the contact peak is partially overlapped with the signal from the NW and cannot be measured separately). It is in a good agreement with the results of direct Monte-Carlo simulation using the Casino v3.2 program, 8 confirming that the contacts of our composition and thickness absorb most of the 10 kV electron beam.…”
supporting
confidence: 86%
“…This fraction, collected by the upper electrode, is 30%-40% (for the lower electrode, the contact peak is partially overlapped with the signal from the NW and cannot be measured separately). It is in a good agreement with the results of direct Monte-Carlo simulation using the Casino v3.2 program, 8 confirming that the contacts of our composition and thickness absorb most of the 10 kV electron beam.…”
supporting
confidence: 86%
“…In order to asses the yield and origin of secondary electrons as well as backscattered electrons in SEM, Monte Carlo simulations using CASINO [19] have been utilized. The sample was modeled using a 2 nm thick carbon layer on a 10 nm thick gold slab on top of a silicon substrate.…”
Section: Simulation Methodsmentioning
confidence: 99%
“…To reveal the relationship between thickness and measured signal, the scattering process toward the sample material of known density and composition is simulated by a Monte Carlo software tool (33)(34)(35) that was introduced by Reichelt and Engel (36), and extended by Krzyzánek and Reichelt (37). Having simulated the scattering path of numerous electrons for a range of thicknesses, T, the software tool calculates the fraction of electrons N sca /N 0 that scatter toward the detector for each thickness.…”
Section: Thickness Determinationmentioning
confidence: 99%