Three-dimensional fabrication and characterisation of core-shell nano-columns using electron beam patterning of Ge-doped SiO<sub>2</sub>

Gontard, Lionel C.; Jinschek, Joerg R.; Ou, Haiyan; Verbeeck, Johan; Dunin-Borkowski, Rafal E.

doi:10.1063/1.4731765

Cited by 10 publications

(6 citation statements)

References 25 publications

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“…The field-driven migration of cations in silicate glasses has also been observed in STEMs [132][133][134]. In this case, inelastic scattering between beam electrons and atomic electrons results in many of the latter being ejected from the highly localized probed region (<1.0 nm in diameter).…”

Section: Induced-electric-field Modelmentioning

confidence: 80%

“…DIEF is a result of the simultaneous displacements of all the affected ions. The cations may either move out of the illuminated region along with the anions moving in [132][133][134]143], or redistribute to other crystallographic sites [136,139] within the illuminated region. Thus, these massive atomic displacements driven by the induced electric field may easily overshadow the effects caused by knock-on and/or radiolysis.…”

Section: Dief Modelmentioning

confidence: 99%

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Electron beam damage in oxides: a review

Jiang

2015

Rep. Prog. Phys.

242

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This review summarizes a variety of beam damage phenomena relating to oxides in (scanning) transmission electron microscopes, and underlines the shortcomings of currently popular mechanisms. These phenomena include mass loss, valence state reduction, phase decomposition, precipitation, gas bubble formation, phase transformation, amorphization and crystallization. Moreover, beam damage is also dependent on specimen thickness, specimen orientation, beam voltage, beam current density and beam size. This article incorporates all of these damage phenomena and experimental dependences into a general description, interpreted by a unified mechanism of damage by induced electric field. The induced electric field is produced by positive charges, which are generated from excitation and ionization. The distribution of the induced electric fields inside a specimen is beam-illumination- and specimen-shape- dependent, and associated with the experimental dependence of beam damage. Broadly speaking, the mechanism operates differently in two types of material. In type I, damage increases the resistivity of the irradiated materials, and is thus divergent, resulting in phase separation. In type II, damage reduces the resistivity of the irradiated materials, and is thus convergent, resulting in phase transformation. Damage by this mechanism is dependent on electron-beam current density. The two experimental thresholds are current density and irradiation time. The mechanism comes into effect when these thresholds are exceeded, below which the conventional mechanisms of knock-on and radiolysis still dominate.

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Section: Induced-electric-field Modelmentioning

confidence: 80%

Section: Dief Modelmentioning

confidence: 99%

Electron beam damage in oxides: a review

Jiang

2015

Rep. Prog. Phys.

242

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“…Nonetheless, it must be taken into consideration that in the case of examining samples at high image magnifications, beam irradiation damage is likely because the electron beam can deposit energy that cannot be fully dissipated. Thus, radiation‐induced heating can increase highly the temperature of the sample and damage it . Finally, although the application of the methodology does not require changes in existing equipment, data acquisition and processing can take between 2 hours for 3D SEM and several hours for 3D SEM‐EDXS.…”

Section: Figurementioning

confidence: 99%

“…Thus, radiation-induced heating can increase highly the temperature of the sample and damage it. [21] Finally, although the application of the methodology does not require changes in existing equipment, data acquisition and processing can take between 2 hours for 3D SEM and several hours for 3D SEM-EDXS. Therefore, it could be made more routine by developing tools for automating the acquisition and processing of the SEM and EDXS datasets.…”

Section: Accurate 3d Characterization Of Catalytic Bodies Surface By mentioning

confidence: 99%

Accurate 3D Characterization of Catalytic Bodies Surface by Scanning Electron Microscopy

et al. 2019

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Catalytic bodies of millimetric dimensions are frequently used in industrial catalysis. The engineering process applied on the raw nanocatalyst during the fabrication and the working conditions affect the spatial and chemical relations of the exposed surface of the catalytic device. Hence, for improving their synthesis and for monitoring the evolution during its life cycle it is important understanding the actual heterogeneities of their surfaces. In this work scanning electron microscopy, photogrammetry and X‐Ray spectroscopy are combined to perform physico‐chemical characterization in three‐dimensions and with high resolution of the surface of commercial water gas shift catalyst bodies. By analyzing a phase of carbon present on their surface we show that the method provides measurements that are at the same time reliable, accurate and precise.

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“…In HRTEM studies, the effect of irradiation by highly energetic electrons must be taken into account (Egerton et al, 2004;Gontard et al, 2012). In particular, the energy supplied by an electron in an elastic collision can displace an atom (knock-on) if the maximum energy transferred is higher than the threshold energy for removing the atom from its site.…”

Section: Introductionmentioning

confidence: 99%

Transmission electron microscopy of thiol-capped Au clusters on C: Structure and electron irradiation effects

Gontard

Dunin-Borkowski

2015

Micron

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Three-dimensional fabrication and characterisation of core-shell nano-columns using electron beam patterning of Ge-doped SiO₂

Cited by 10 publications

References 25 publications

Electron beam damage in oxides: a review

Electron beam damage in oxides: a review

Accurate 3D Characterization of Catalytic Bodies Surface by Scanning Electron Microscopy

Transmission electron microscopy of thiol-capped Au clusters on C: Structure and electron irradiation effects

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Three-dimensional fabrication and characterisation of core-shell nano-columns using electron beam patterning of Ge-doped SiO2

Cited by 10 publications

References 25 publications

Electron beam damage in oxides: a review

Electron beam damage in oxides: a review

Accurate 3D Characterization of Catalytic Bodies Surface by Scanning Electron Microscopy

Transmission electron microscopy of thiol-capped Au clusters on C: Structure and electron irradiation effects

Contact Info

Product

Resources

About

Three-dimensional fabrication and characterisation of core-shell nano-columns using electron beam patterning of Ge-doped SiO₂