Three-dimensional measurement of small-object surfaces on the basis of fiber optic interferometric fringe projection

Abstract

Three-dimensional measurement of small-object surfaces on the basis of fiber Three-dimensional measurement of small-object surfaces on the basis of fiber optic interferometric fringe projection optic interferometric fringe projection Abstract Abstract We used a system that exploits the Mach-Zehnder interferometer structure and Young's double-pinhole interference principle to measure the three-dimensional topographies of small objects at high precision.Next, we performed phase profilometry to measure small objects and achieve a height measurement within a 10 x 10cm area. The accuracy of the measurement system improved by 44.1%, and the measurement time was reduced by 63.2%. . (2018). Three-dimensional measurement of small-object surfaces on the basis of fiber optic interferometric fringe projection. Optical Engineering, 57 (9), 094105-1-094105-9.Abstract. We used a system that exploits the Mach-Zehnder interferometer structure and Young's doublepinhole interference principle to measure the three-dimensional topographies of small objects at high precision.Next, we performed phase profilometry to measure small objects and achieve a height measurement within a 10 × 10-cm area. The accuracy of the measurement system improved by 44.1%, and the measurement time was reduced by 63.2%.