2021
DOI: 10.1038/s41565-021-00966-5
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Three-dimensional monolithic micro-LED display driven by atomically thin transistor matrix

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Cited by 162 publications
(129 citation statements)
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“…The LED structure is further confirmed by the TEM. The selected area diffraction patterns (SADPs) are represented in Figure 2 a, where the zone axis (ZA) is along the [ 1 , 2 , 3 , 4 , 5 , 6 , 7 , 8 , 9 , 10 ] direction. The MQWs’ structure is shown in Figure 2 b, where the 4× blue MQWs and 1× green QW are clear to be seen.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…The LED structure is further confirmed by the TEM. The selected area diffraction patterns (SADPs) are represented in Figure 2 a, where the zone axis (ZA) is along the [ 1 , 2 , 3 , 4 , 5 , 6 , 7 , 8 , 9 , 10 ] direction. The MQWs’ structure is shown in Figure 2 b, where the 4× blue MQWs and 1× green QW are clear to be seen.…”
Section: Resultsmentioning
confidence: 99%
“…Indium gallium nitride (InGaN) light-emitting diodes (LEDs) are essential for high quality illumination [ 1 , 2 , 3 ] and high resolution, high brightness and fast response displays [ 4 , 5 , 6 ], thus playing an important role in lighting, high definition TV (HDTV), visual reality (VR)/augmented reality (AR) displays, etc. [ 7 , 8 ].…”
Section: Introductionmentioning
confidence: 99%
“…[13][14][15] Integration of red, green and blue (RGB) micro-LEDs has been highlighted not only for high color rendition white illumination, but for full-color displays, wearable devices, highbrightness augmented-reality (AR) and visual reality devices. [16][17][18][19] Recently, III-nitride micro-LEDs play an important role in the biomedical area, due to its outstanding biocompatibility, low heating property and stability. 20,21 Moreover, there has been unprecedented development of UV-LEDs due to potential applications in UV sensing, optical data storage, sterilization.…”
Section: Shengjun Zhoumentioning
confidence: 99%
“…In recent years, semiconducting 2D materials, especially transition metal dichalcogenides (TMDs), attract extensive research interests for various applications such as advanced electronics and optoelectronics. [1][2][3][4][5][6][7] For example, substantial investigations have focused on demonstrating high-performance TMDs-based on the high quality HfAlO 2 film synthesis with the systematically optimized condition, which was determined as 0.3 m precursor concentration, 400 °C annealing temperature in the mixed gas atmosphere of 95% N 2 and 5% H 2 for 30 min. Then, with MoTe 2 patterns as conduction channel and HfAlO 2 film as dielectric, the pristine CVD-grown polycrystalline MoTe 2 TFTs were constructed, which was followed with further effort of proper postannealing treatment to improve device performance.…”
Section: Introductionmentioning
confidence: 99%
“…[4,5] Nevertheless and regrettably, other possible applicability such as TMDs-based thin film transistors (TFTs), which feature the vital applications like large-area and flexible electronics, was rarely systematically demonstrated. [6] Differing from high-performance TMDs FETs as possible alternative to silicon, low cost and simplicity of fabrication process are especially critical for applications of TMDs-based TFTs, except for their basic requirement of device performance. [1] In this regard, the technology of high-k dielectric film fabrication attracts particular concern as the key step of the TFTs fabrication process.…”
mentioning
confidence: 99%