As sensors, wireless communication devices, personal health monitoring systems, and autonomous microelectromechanical systems (MEMS) become distributed and smaller, there is an increasing demand for miniaturized integrated power sources. Although thinfilm batteries are well-suited for on-chip integration, their energy and power per unit area are limited. Three-dimensional electrode designs have potential to offer much greater power and energy per unit area; however, efforts to date to realize 3D microbatteries have led to prototypes with solid electrodes (and therefore low power) or mesostructured electrodes not compatible with manufacturing or on-chip integration. Here, we demonstrate an on-chip compatible method to fabricate high energy density (6.5 μWh cm −2 ·μm −1 ) 3D mesostructured Li-ion microbatteries based on LiMnO 2 cathodes, and NiSn anodes that possess supercapacitor-like power (3,600 μW cm −2 ·μm −1 peak). The mesostructured electrodes are fabricated by combining 3D holographic lithography with conventional photolithography, enabling deterministic control of both the internal electrode mesostructure and the spatial distribution of the electrodes on the substrate. The resultant full cells exhibit impressive performances, for example a conventional light-emitting diode (LED) is driven with a 500-μA peak current (600-C discharge) from a 10-μm-thick microbattery with an area of 4 mm 2 for 200 cycles with only 12% capacity fade. A combined experimental and modeling study where the structural parameters of the battery are modulated illustrates the unique design flexibility enabled by 3D holographic lithography and provides guidance for optimization for a given application.energy storage | microelectronics | miniature batteries | lithium-ion batteries | interference lithography M icroscale devices typically use power supplied off-chip because of difficulties in miniaturizing energy storage technologies (1, 2). However, a miniaturized on-chip battery would be highly desirable for applications including autonomous microelectromechanical systems (MEMS)-based actuators, microscale wireless sensors, distributed monitors, and portable and implantable medical devices (3-8). For many of the applications, high energy density, high power density (charge and/or discharge), or some combination of high energy and power densities is required, all characteristics which can be difficult to achieve in a microbattery due to size and footprint restrictions, and process compatibilities with the other steps required for device fabrication. Although 2D thin-film microbatteries (typical thickness of a few micrometers) can deliver high power, they require large (often cm 2 ) footprints to provide reasonable energies (9). Making the electrodes thicker boosts the theoretical areal energy density but the resultant increases in electron and ion diffusion lengths reduce the effective power and energy densities. Efforts to improve microbattery performance have focused on increasing the electrode surface area and active material loading...