2015
DOI: 10.1103/physrevb.91.155308
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Three-dimensional photonic crystals fabricated by simultaneous multidirectional etching

Abstract: We discuss three-dimensional (3D) photonic crystals fabricated by simultaneous multidirectional plasma etching. First, we investigate a method for controlling the ion sheath used in reactive ion etching for obtaining multidirectional etching. We then discuss the fabrication tolerance from an analytical perspective. Based on our results, we demonstrate the fabrication of 3D photonic crystals with thicknesses of 1, 1.5, and 2 lattice periods in the surface-normal direction on single-crystalline silicon wafers, w… Show more

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Cited by 13 publications
(8 citation statements)
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“…The PCSs are often introduced with defects within their lattice structures, e.g., to create waveguides [3,4,[6][7][8][9][10][11], which allow the propagation of light in a particular direction, or trap light in cavities [12][13][14][15][16][17][18][19][20][21][22][23]. The fabrication of these PCSs is made possible through semiconductor growth techniques [2], such as etching [24] and lithography [25].…”
Section: Introductionmentioning
confidence: 99%
“…The PCSs are often introduced with defects within their lattice structures, e.g., to create waveguides [3,4,[6][7][8][9][10][11], which allow the propagation of light in a particular direction, or trap light in cavities [12][13][14][15][16][17][18][19][20][21][22][23]. The fabrication of these PCSs is made possible through semiconductor growth techniques [2], such as etching [24] and lithography [25].…”
Section: Introductionmentioning
confidence: 99%
“…These PCSs are also often introduced with defects within their lattice structures to create waveguides 3,[6][7][8][9][10][11][12] , which allow the propagation of light in a particular direction, or cavities [13][14][15][16][17][18][19][20][21][22][23][24] , thus allowing the confinement of light. The fabrication of these types of structures is usually done through semiconductor growth techniques 2 , such as etching 25 or lithography 26 .…”
Section: Introductionmentioning
confidence: 99%
“…Hierarchically porous 3D materials with porosity in the micro, meso and macro ranges are receiving increasing attention from a wide range of research fields such as energy conversion and storage areas, 1,2 catalysis, 3,4 biomedicine, 5,6 sensors, 7,8 and optics, 9,10 among others. 11 The self-assembly of colloidal spheres is a straightforward approach to produce porous 3D structures.…”
Section: Introductionmentioning
confidence: 99%