2015
DOI: 10.1007/s11018-015-0695-1
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Three-Dimensional Reconstruction of the Surfaces of Relief Structures from Stereoscopic Images Obtained in a Scanning Electron Microscope

Abstract: The profi le of the surfaces of two samples of monocrystalline silicon containing trapezoidal-shaped protrusions is established by means of three-dimensional reconstruction from stereoscopic images obtained in a scanning electron microscope and the average value of the height of the protrusions is determined. The results are compared with the results of measurements by an atomic-force microscope. The advantage in terms of precision of reconstruction for a sample that has been subjected to additional plasma tre… Show more

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Cited by 3 publications
(2 citation statements)
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“…Compared with the x-y stage, the tilting stage is able to tilt the sample to a certain degree under the microscope, whereby it possible to image the sample from different orientations and to construct a 3D structure. For instance, this technique has been successfully used to observe biological cells under an optical microscope (OM) [ 15 , 16 ], and fracture surfaces with subsequent 3D reconstruction under a scanning electron microscope (SEM) [ 17 , 18 ], and nanomaterials under a transmission electron microscope (TEM) [ 19 , 20 ]. However, in this method, more than half of the sample data still cannot be obtained due to the small tilting angles possible.…”
Section: Introductionmentioning
confidence: 99%
“…Compared with the x-y stage, the tilting stage is able to tilt the sample to a certain degree under the microscope, whereby it possible to image the sample from different orientations and to construct a 3D structure. For instance, this technique has been successfully used to observe biological cells under an optical microscope (OM) [ 15 , 16 ], and fracture surfaces with subsequent 3D reconstruction under a scanning electron microscope (SEM) [ 17 , 18 ], and nanomaterials under a transmission electron microscope (TEM) [ 19 , 20 ]. However, in this method, more than half of the sample data still cannot be obtained due to the small tilting angles possible.…”
Section: Introductionmentioning
confidence: 99%
“…For instance, various title stages have been adopted to rotate samples recently. 15,16 Yet, these stages can only tilt samples within a small angle, which means that some surface defects are still invisible. To increase the title range, some manipulators and holders have been designed to rotate samples in a 360 • way.…”
mentioning
confidence: 99%