Three-electrode excimer laser with an intermediate control electrode

Borovkov, Valeriy V.; Воронин, В. В.; Voronov, S. L.; Lazhintsev, B V; Nor-Arevyan, V A; Tananakin, V.A.; Feodorov, Gennadiy I.

doi:10.1117/12.216926

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1998

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“…It was reported in Ref. 8,10 about the successful implementation of this system both with equal and nonequal discharge gaps for excitation excimer, Ar.Xe and CO2 -laser mixtures.…”

Section: Introductionmentioning

confidence: 95%

XeCl laser based on a three-electrode system of a double discharge formation

Borovkov¹,

Воронин²,

Voronov³

et al. 1998

SPIE Proceedings

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The paper describes a three-electrode electric-discharge XeC1 -laser, in which the discharge ignition takes place, when a highvoltage pulse is delivered to a middle control electrode, a capacitor bank of the main discharge is connected directly to two other electrodes. The three-electrode system of a double discharge formation provides a sequential in time breakdown of two discharge gaps followed by a general discharge current The laser reached the high efficiency up to 3.7 % with the fast commutation < 5 % from the pump energy and a significant decrease of the load on the elements of the electric system of the laser power supply.

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“…It was reported in Ref. 8,10 about the successful implementation of this system both with equal and nonequal discharge gaps for excitation excimer, Ar.Xe and CO2 -laser mixtures.…”

Section: Introductionmentioning

confidence: 95%