This paper presents a W-band planar type via-monopole based quasi Yagi-Uda antenna using metal coated through glass silicon via structures. The antenna was designed and fabricated on 350 µm thick borosilicate glass substrate, which has very low dielectric loss compared with silicon at millimeterwave frequencies. We used a microstrip line to feed the antenna, and the Yagi-Uda configuration using via structured radiator; reflectors; and director were fabricated using tungsten coated silicon via structures embedded in reflowed glass substrate with good high frequency characteristics. The proposed antenna achieved vertical polarization in planar configuration with height 0.09λo. High gain with end-fire radiation was achieved due to the Yagi-Uda configuration. Measured results confirmed the fabricated antenna operated in the W-band with 10 dB fractional bandwidth (FBW) of 12.5% from 76.3 to 86.5 GHz and peak gain of 7.82 dBi at 81 GHz in the end-fire direction. Thus, the proposed antenna with end-fire radiation will be useful for millimeter-wave onboard wireless communication, radar imaging, and tracking applications. INDEX TERMS Borosilicate-glass, end-fire, Yagi-Uda antenna, through glass silicon via (TGSV). I. INTRODUCTION With the ongoing development of modern communication systems, there has been growing demand for high Gbps data rates [1]; since bandwidth is directly proportional to communication data rates [2]. Therefore, radio frequency (RF) front ends operating at frequencies above 70 GHz or higher have attracted considerable research attention [3], [4]. High atmospheric absorption at these frequencies make them suitable for high speed short range communication, requiring antennas with high gain for W-band applications, such as high resolution radar imaging, remote sensing and high speed wireless communication [5], [6]. Signal-to-interference-plusnoise ratio (SINR) generally decreases at high frequencies due to extreme free space loss. Therefore, suitable antennas are critical to meet challenging requirements. Highly directional antennas and line-of-sight (LOS) communication can The associate editor coordinating the review of this manuscript and approving it for publication was Yuan Yao .