Tilted Interdigital-transducer in NS-SAW Resonator for Transverse Mode Suppression

Wu, Shuxian; Bao, Feihong; Xu, Feng; Zou, Jie; Li, Ming; Tang, Gongbin

doi:10.1109/eftf/ifcs54560.2022.9850616

Cited by 9 publications

(2 citation statements)

References 21 publications

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“…Micromachines 2023, 14,1929 2 of 18 the advantages of limiting the surface energy effect, having a high-quality factor value, excellent frequency stability, superior heat dissipation performance, and a wider range of applications in resonator frequency compared to traditional SAW bulk resonators. However, the I.H.P.…”

Section: Introductionmentioning

confidence: 99%

“…One method involves tilting the resonator at an angle in the direction of SAW propagation. Although the transverse modes spurious are suppressed after the resonator is tilted, its Q value decreases compared to the non-tilted resonator [14]. The other method involves adding a piston structure to the dummy finger [15,16] which can suppress the transverse modes spurious while maintaining the Q value without decreasing.…”

Section: Introductionmentioning

confidence: 99%

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Designed Structures of Interdigital Electrodes for Thin Film SAW Devices

Qian,

Shuai,

et al. 2023

Micromachines

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This paper studied the impact of the microstructure of interdigital electrodes on the performance of surface acoustic wave (SAW) resonators and proposed an innovative piston, dummy finger and tilt (PDT) structure, which was then applied to the GLONASS L3 band filters. Through the adoption of 3D finite element simulation (FEM), photolithography, and testing on an incredible high-performance surface acoustic wave (I.H.P. SAW) substrate, it is concluded that the total aperture length is 20T (T is period), resulting in a more optimal resonator performance; changing the width and length of the piston can suppress transverse modes spurious, but it does not enhance impedance ratio; to further improve the quality of the SAW resonator, the proposed PDT structure has been experimentally proven to not only effectively suppress transverse modes spurious but also possess a high impedance ratio. By utilizing a PDT structure within a “T + π” topology circuit, we successfully designed and manufactured a GLONASS L3 band filter with a bandwidth of 8 MHz and an insertion loss of 3.73 dB. The design of these resonators and filters can be applied to the construction of SAW filters in similar frequency bands such as BeiDou B2 band or GPS L2/L5 band.

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Section: Introductionmentioning

confidence: 99%