Tilting out-of-plane platform for optical applications

Overstolz, T.; Clerc, P.-A.; Gale, M. D.; Herzig, Hans Peter; Niederer, Guido; Noell, Wilfried; Sochtig, J.; Thiele, Hans; Rooij, N. F. de

doi:10.1109/omems.2002.1031453

Cited by 7 publications

(5 citation statements)

References 2 publications

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“…The typical measured load-deflection relation of the torsional micromirror is depicted in figure 10(a). This demonstrates that the torsional micromirror has an optical scanning angle near 5 • when driven at 90 V. Various optical scanners driven by the VCA have been reported in [4,[21][22][23][24][25]. By way of comparison with a typical scanner fabricated using a SOI wafer [22], the optical scanning angle was near 4 • when driven at 80 V. Note that no side-sticking phenomenon was observed during the driving test.…”

Section: Applicationsmentioning

confidence: 66%

“…This demonstrates that the torsional micromirror has an optical scanning angle near 5 • when driven at 90 V. Various optical scanners driven by the VCA have been reported in [4,[21][22][23][24][25]. By way of comparison with a typical scanner fabricated using a SOI wafer [22], the optical scanning angle was near 4 • when driven at 80 V. Note that no side-sticking phenomenon was observed during the driving test. From figure 10(a) we can find that when the deflection angle is larger than 3 • , the variation of the angle with the driving voltage no longer follows the quadratic relationship predicted from analysis.…”

Section: Applicationsmentioning

confidence: 66%

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The BELST II process for a silicon high-aspect-ratio micromaching vertical comb actuator and its applications

Tsai¹,

Chu²,

Hsieh³

et al. 2003

J. Micromech. Microeng.

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The BELST process has been proposed and it has demonstrated the capability to overcome anchoring and depth controlling issues in many high-aspect-ratio micromaching (HARM) processes. However, the actuation mechanisms are still restricted to in-plane motion only. In this study, a novel fabrication process called BELST II has successfully been developed. Moreover, the BELST II process was employed to fabricate a novel electrostatic vertical comb actuator (VCA). Three advantages for this VCA can be observed. First, through some exquisite designs the fabrication process has no critical alignment and bonding problems. Secondly, the relative vertical position between the moving and the stationary fingers can be adjusted freely to optimize the performance of the VCA. Thirdly, both a large mirror structure and trimmed torsional spring are available through this process. Thus, improved performance regarding enlarged traveling distance with reduced driving voltage can be obtained. In the application of the BELST II process, various HARM devices were realized, such as an optical scanner mirror and variable optical attenuator driven by the VCA.

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Section: Applicationsmentioning

confidence: 66%

Section: Applicationsmentioning

confidence: 66%

The BELST II process for a silicon high-aspect-ratio micromaching vertical comb actuator and its applications

Tsai¹,

Chu²,

Hsieh³

et al. 2003

J. Micromech. Microeng.

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“…The two types of actuators are tilt (c) and piston (d), connected via a height adapter (b) to the X -shaped springs (a) lying at the outer edges. Both degrees of freedom are enacted using a single spring: vertical comb drives 19,20 are used in a symmetric way for out-of-plane piston movement and in an asymmetric manner for enacting the torque for tilting.…”

Section: Operation Principlementioning

confidence: 99%

Design, simulation, fabrication, packaging, and characterization of a MEMS-based mirror array for femtosecond pulse-shaping in phase and amplitude

Weber

Bonacina

Noell³

et al. 2011

Review of Scientific Instruments

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We present an in-detail description of the design, simulation, fabrication, and packaging of a linear micromirror array specifically designed for temporal pulse shaping of ultrashort laser pulses. The innovative features of this device include a novel comb-drive actuator allowing both piston and tilt motion for phase-and amplitude-shaping, and an X-shaped laterally reinforced spring preventing lateral snap-in while providing high flexibility for both degrees of freedom.

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“…For the actual design (see Fig. 2) vertical comb drives 19,20 were therefore incorporated, as they provide a precise manner of displacement. The mirror shape was adapted to the particularities of the optical setup by using high aspect-ratio, rectangular shapes (80 μm x 1000 μm).…”

Section: Conceptmentioning

confidence: 99%

Linear micromirror array for broadband femtosecond pulse shaping in phase and amplitude

Weber¹,

Waldis

Noell

et al. 2009

SPIE Proceedings

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We are developing a linear array of micromirrors designed for optical, femtosecond laser pulse shaping. It is a bulkmicromachined device, capable of retarding or diminishing certain laser frequencies in order to perform phase and amplitude modulation within a frequency band spanning the UV to the near-infrared. The design consists of a linear array of mirrors fixed on either side by springs. They feature two degrees of freedom: Out-of-plane motion for phase shifting and rotational motion for binary amplitude modulation, both realized using vertical comb drives. The first applications will include femtosecond discrimination experiments on biomolecules

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Tilting out-of-plane platform for optical applications

Cited by 7 publications

References 2 publications

The BELST II process for a silicon high-aspect-ratio micromaching vertical comb actuator and its applications

The BELST II process for a silicon high-aspect-ratio micromaching vertical comb actuator and its applications

Design, simulation, fabrication, packaging, and characterization of a MEMS-based mirror array for femtosecond pulse-shaping in phase and amplitude

Linear micromirror array for broadband femtosecond pulse shaping in phase and amplitude

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