A novel fabrication technique of yttrium silicate (Y 2 SiO 5 ) nanocrystallites has been investigated by a microwave hydrothermal process with a later heat treatment. The prepared powders were analyzed by X-ray diffraction (XRD), Fourier transform infrared spectroscopy (FTIR), thermal analysis, and field emission scanning electron microscopy (FESEM). Results show that high-purity yttrium silicate (Y 2 SiO 5 ) powders can be synthesized by the microwave hydrothermal process with a later heat treatment at 700• C for 2 h. The Y 2 SiO 5 precursor powders prepared by microwave hydrothermal process without heat treatment are weak crystallization, which shows an irregular and cotton-fiber-like morphology. After the heat treatment at 700• C for 2 h, well crystallized phase-pure Y 2 SiO 5 powders with 400-600 nm grainy morphology are achieved. Further heat treatment at higher temperature will result in the sintering and serious agglomeration of the powders. The formation process of Y 2 SiO 5 nanocrystallites was explained based on the photographs of SEM.