2010
DOI: 10.1016/j.vacuum.2010.09.005
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Time and space resolved Langmuir probe measurements of a pulsed vacuum arc plasma

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Cited by 18 publications
(10 citation statements)
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References 17 publications
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“…In Fig. 10, ion velocities spread from 14.5 km/s to more than 28 km/s, which is consistent with the values usually found in the literature [3,28,29]. Again the large velocity spread reveals the stochastic character of the arc formation.…”
Section: Velocitysupporting
confidence: 88%
See 1 more Smart Citation
“…In Fig. 10, ion velocities spread from 14.5 km/s to more than 28 km/s, which is consistent with the values usually found in the literature [3,28,29]. Again the large velocity spread reveals the stochastic character of the arc formation.…”
Section: Velocitysupporting
confidence: 88%
“…These values are in good agreement with ones obtained in other works on VAT, see e.g. [3,28,29]. In the remainder of the paper we will solely consider the first large peak on the ion current traces as the origin of other peaks is questionable.…”
Section: Velocitysupporting
confidence: 88%
“…Most of these studies considered the Maxwellian velocity distribution for the electrons to simulate the characteristics of the plasma sheath in PIII devices. However, deviation from this well-known distribution for different plasma sources has been frequently reported in the literature (Liu et al 1994;Hori et al 1996;Segre and Pieroni 1975;Godyak et al 2002;Godyak 2005;Li 2006;Tang et al 2009;Chen et al 2010). Godyak et al (2002), Godyak (2005), Hori et al (1996) and Li (2006) measured the electron probability function in an inductively coupled plasma which commonly used as the plasma source in PIII process.…”
Section: Introductionmentioning
confidence: 99%
“…They obviously showed the electron probability function deviation from the Maxwellian form at the various powers, working pressures and conditions. Chen et al (2010) measured the temporal and spatial evolution of a pulsed vacuum arc plasma and showed that the electron energy distribution function is non-Maxwellian because the high-energy electrons depart from the Maxwellian distribution. Therefore several studies focused to describe the PIII plasma behaviour in the presence of non-Maxwellian electrons (Kushner 1985;Shiraishi and Takamura 1990;Godyak et al 1995;Demidov et al 2005;Gyergyek and erek 2005;Demidov et al 2006;Gurovich et al 2006;Sharifian and Shokri 2007;Gyergyek et al 2008) to give more realistic prediction of the involved systems.…”
Section: Introductionmentioning
confidence: 99%
“…Langmuir probes are one of the most commonly used diagnosis tools for the plasma. A difficulty will arise in using a Langmuir probe in the pulsed discharge because the pulse discharge time is usual much shorter than the usual whole voltage sweep time, but if the discharge pulses have a high level of repeatability, an ingenious method can be used to construct the pulsed vacuum arc plasma parameters by a Langmuir probe [9,10] .…”
Section: Introductionmentioning
confidence: 99%