The ablation of solids by high energy femtosecond pulses from an extreme ultraviolet ͑XUV͒ free electron laser has been investigated using picosecond optical imaging. The time-resolved measurements are supplemented by an analysis of the permanent structural surface modifications. Compared with femtosecond optical excitation, distinct differences in the material response are found which are attributed to the increased penetration depth of the XUV radiation and the absence of any absorption nonlinearities. © 2006 American Institute of Physics. ͓DOI: 10.1063/1.2405398͔ Ultrashort laser pulses allow to create states of strong electronic excitation and high temperature and pressure in solid materials. Under these conditions phase transitions and ablation occur on very rapid time scales, and often along unusual, nonequilibrium pathways. Up to now mainly femtosecond optical lasers have been used for material excitation, but the interpretation of experimental data is often difficult because of the highly nonlinear nature of the deposition of optical energy in the intensity range of interest ͑Ͼ10 12 W/cm 2 ͒.Unique possibilities for both generating and probing high energy density states of matter are emerging with the recent advent of short-wavelength accelerator-based light sources. 1,2 Among these future light sources the extreme ultraviolet ͑XUV͒ free electron laser ͑FEL͒ FLASH ͑free electron laser in Hamburg͒ 3 at the Deutsches ElektronenSynchrotron ͑DESY͒ in Hamburg, Germany is currently the only self-amplified spontaneous emission FEL 4 operating in the 6 -100 nm wavelength range.The irradiation of solid materials with such shortwavelength femtosecond pulses offers a number of advantages. First of all it permits a high degree of electronic excitation but with a strongly reduced influence of optical nonlinearities ͑i.e., multiphoton absorption and free carrier absorption͒. Moreover, for frequencies higher than the plasma frequency but lower than the frequency of the innershell absorption edge, the absorption depth for some materials can be rather long. Therefore, ultrashort XUV pulses allow the preparation of rather well-defined excitation conditions in relatively large sample volumes as compared with femtosecond optical pulses.In this letter we report on the results of experiments performed at FLASH on the interaction of ultrashort high intensity ͑10 12 -10 14 W/cm 2 ͒ XUV pulses with solid surfaces. In an XUV-pump/optical probe experiment picosecond optical imaging has been used to follow the dynamics of short-pulse XUV-induced phase transitions and ablation. The time-resolved measurements are supplemented by a characterization of the permanent structural modifications of the irradiated surfaces. A comparison with femtosecond optical excitation reveals distinct differences in the material response which we attribute to the absence of absorption nonlinearities and the increased penetration of the XUV light in the materials ͑Si and GaAs͒ discussed in this study.Experiments were performed at beamline BL2 of the FLASH...