Time Domain Reflectometry Analysis of the Dispersion of Metal–Insulator–Metal Capacitance

Noh, Jinwoo; Kim, Seung Mo; Heo, Sungho; Kang, Soo Cheol; Kim, Yonghun; Lee, Young Gon; Park, Hokyung; Lee, Seokkiu; Lee, Byoung Hun

doi:10.1109/led.2017.2671367

Cited by 5 publications

(4 citation statements)

References 14 publications

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“…(e 12 e 21 − e 11 e 22 ) = Γ AA _Air Γ BB _Air (3) where Γ AA _Air is the reflection coefficient measurement, for air at plane AA , and Γ BB _Air is the standard value of the air reflection coefficient at plane BB , obtained using the COMSOL simulator. Similarly, for MUT measurement, the Equation (2) can be expressed as:…”

Section: Calibration Formulationsmentioning

confidence: 99%

“…To reduce the uncertainty of the measurements, the sensors should have a large sensing area, a high concentration of sensing field, and high sensitivity to the slight changes in material under test (MUT). The operating frequency of the permittivity, ε r measurements in most of the material processing industries are up to a few hundred MHz [1][2][3].…”

Section: Introductionmentioning

confidence: 99%

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Precision Permittivity Measurement for Low-Loss Thin Planar Materials Using Large Coaxial Probe from 1 to 400 MHz

You¹,

Sim²

2018

JMMP

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This paper focuses on the non-destructive dielectric measurement for low-loss planar materials with a thickness of less than 3 mm using a large coaxial probe with an outer diameter of 48 mm. The aperture probe calibration procedure required only to make a measurement of the half-space air and three offset shorts. The reflection coefficient for the thin material is measured using a Keysight E5071C network analyzer from 0.3 MHz to 650 MHz and then converted to a relative dielectric constant, εr and tangent loss, tan δ via closed form capacitance model and lift-off calibration process. Average measurement error of dielectric constant, Δεr is less than 6% from 1 MHz to 400 MHz and the resolution of loss tangent, tan δ measurement is capable of achieving 10−3.

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Section: Calibration Formulationsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Precision Permittivity Measurement for Low-Loss Thin Planar Materials Using Large Coaxial Probe from 1 to 400 MHz

You¹,

Sim²

2018

JMMP

View full text Add to dashboard Cite

show abstract

“…As far as possible, please keep the introduction comprehensible to scientists outside your particular field of research. References should be numbered in order of appearance and indicated by a numeral or numerals in square brackets, e.g., [1] or [2,3], or [4][5][6]. See the end of the document for further details on references.…”

Section: Introductionmentioning

confidence: 99%

“…To reduce the uncertainty of the measurements, the sensors should have large sensing area, high concentration of sensing field and high sensitivity to the slight changes in material under test (MUT). The operating frequency of the permittivity, εr measurements in most of the material processing industries are up to a few hundred MHz [1]- [3].…”

Section: Introductionmentioning

confidence: 99%

Precision Permittivity Measurement for Low-Loss Thin Planar Materials Using Large Coaxial Probe from 1 to 400 MHz

You¹,

Sim²

2018

Preprint

View full text Add to dashboard Cite

This paper focuses on the non-destructive dielectric measurement for low-loss planar materials with a thickness of less than 3 mm using a large coaxial probe with an outer diameter of 48 mm. The aperture probe calibration procedure required only to make a measurement of the half-space air and three offset shorts. The reflection coefficient for the thin material is measured using a Keysight E5071C network analyzer from 0.3 MHz to 650 MHz and then converted to a relative dielectric constant and tangent loss via closed form capacitance model and lift-off calibration process. Measurement error of dielectric constant, Δεr is less than 2.5 % from 1 MHz to 400 MHz and the resolution of loss tangent, tan δ  measurement is capable of achieving 3×10-3.

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Dielectric Dispersion and High Field Response of Multilayer Hexagonal Boron Nitride

Ahmed

Heo

Yang

et al. 2018

Adv Funct Materials

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The dielectric dispersion of a material holds significant importance for the understanding of basic material characteristics and the design parameters of a functional device. Here, the dielectric dispersion characteristics of multilayer hexagonal boron nitride (hBN) using time domain reflectometry under an extended device operating frequency range up to 100 MHz are studied. Contrary to what is previously reported, the capacitance, hence the effective dielectric constant, of hBN decreases with the increase of frequency above the MHz range, indicating heat dissipation in lossy hBN dielectric. Furthermore, hBN shows stubborn dielectric characteristics with temperature changes that confirm its thermal stability in extreme operating conditions. The charge carriers in hBN are transported by Fowler-Nordhiem tunneling with increasing the electrical field. Lastly, hBN endures electrical field of 7.8 MV cm −1 that implies its potential use as a promising dielectric material. These results will benefit the research and development of hBN supported high-speed electronics operated at high-frequency conditions for energyefficient device applications.

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Time Domain Reflectometry Analysis of the Dispersion of Metal–Insulator–Metal Capacitance

Cited by 5 publications

References 14 publications

Precision Permittivity Measurement for Low-Loss Thin Planar Materials Using Large Coaxial Probe from 1 to 400 MHz

Precision Permittivity Measurement for Low-Loss Thin Planar Materials Using Large Coaxial Probe from 1 to 400 MHz

Precision Permittivity Measurement for Low-Loss Thin Planar Materials Using Large Coaxial Probe from 1 to 400 MHz

Dielectric Dispersion and High Field Response of Multilayer Hexagonal Boron Nitride

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