2023
DOI: 10.1039/d3me00032j
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Time-resolved operando analysis of the pyrolysis of a PECVD-deposited siloxane polymer using a combined DRIFTS–MS system

Abstract: Experimental and computational study of the mechanism of conversion, via pyrolysis, of pV4D4 films into silica ceramics and of the impact of preparation conditions on their final structure.

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