Time-resolved measurements of ion energy distributions and optical emissions in pulsed radio-frequency discharges

Abstract

Time-resolved measurement of a shock-driven plasma target for interaction experiments between heavy ions and plasmasTime evolution of ion energy distributions and optical emission in pulsed inductively coupled radio frequency plasmas

Transition from E to H mode discharge in pulse-modulated inductively coupled plasmas

“…When the power is restored after the rf-off time, the electron temperature reaches a high of about 4.5 eV, and then gradually decreases, reaching a steady state at about 3 eV. 10 This phenomenon, observed under many conditions, is considered hereafter. 9 With the lapse of time, as the electron density increases, the electron temperature settles around 3 eV, a typical value for ICP's under this condition.…”

Model and probe measurements of inductively coupled CF4 discharges

“…The neutral number densities were measured using appearance potential mass spectrometry, 15,16 and the ion fluxes and energy distributions were also measured using mass spectrometry. 17,18 The EEDF measured in CF 4 inductively coupled discharge was approximately a Maxwellian distribution at pressures lower than 30 mTorr, resulting in the simplification of models such as global and fluid models due to the validity of the Maxwellian EEDF assumption. The results of fluid models, which couple the plasma generation and transport to the gas flow and heating, agree with the probe measurements in the case of electron temperature, although there is a significant difference in electron density.…”

Ion Energy Distribution in a Radiofrequency C 4 F 8

“…This instability is probably due to the fact that the discharge cannot achieve any clear steady state just after the E -H mode transition. It has been observed in pulsed radiofrequency discharges that the IED exhibits additional peaks as a result of the change in the plasma potential due to different plasma states during the pulse period [9,10]. Thus, under the plasma conditions discussed here, discharge instabilities appear to be responsible for the multiple-peaked structure due to fluctuations of the plasma potential.…”