2012
DOI: 10.1088/0963-0252/21/3/035007
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Time-resolved study of pulsed Ar–N2and Ar–N2–H2microwave surfaguide discharges using optical emission spectroscopy

Abstract: Pulsed surfaguide microwave discharges operating at 2.45 GHz in several Ar-N 2 and Ar-N 2 -H 2 gas mixtures are studied using optical emission spectroscopy. Time-resolved measurements of Ar, N 2 , N + 2 , N, and H emission lines are presented. The gas temperature, and N 2 rotational and vibrational temperatures are also analyzed. Various discharge conditions, dependent on the applied power, discharge pressure, nitrogen and hydrogen content are examined. Time-resolved measurements confirm that N 2 dissociation … Show more

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Cited by 21 publications
(32 citation statements)
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References 40 publications
(81 reference statements)
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“…These effects were observed previously for the other gas mixtures in the same type of discharges [19]. First effect corresponds to the gas heating at the beginning of the plasma pulse, whereas the second one reflects the equilibrium between the gas heating and heat dissipation and should be related to the vibrational-translational (VT) relaxation processes, as suggested in [19]. In our case, the saturation time of T gas is in a good agreement with the VT relaxation time (τ VT ) estimated for the symmetrical vibrational mode of CO 2 , whereas the asymmetric mode time constant appearing to be much larger (see [1,7]).…”
supporting
confidence: 86%
See 1 more Smart Citation
“…These effects were observed previously for the other gas mixtures in the same type of discharges [19]. First effect corresponds to the gas heating at the beginning of the plasma pulse, whereas the second one reflects the equilibrium between the gas heating and heat dissipation and should be related to the vibrational-translational (VT) relaxation processes, as suggested in [19]. In our case, the saturation time of T gas is in a good agreement with the VT relaxation time (τ VT ) estimated for the symmetrical vibrational mode of CO 2 , whereas the asymmetric mode time constant appearing to be much larger (see [1,7]).…”
supporting
confidence: 86%
“…The uncertainty of the obtained temperature (which is about 11% in saturation) is still in the range of the errors described by expression (5) at T gas ∼ 800 K. The time-resolved temperature measurements performed using the three methods show clearly that, at a fixed energy delivered per plasma pulse (E p ), the T gas grows at the beginning of the pulse followed by a saturation after about 0.4 ms. These effects were observed previously for the other gas mixtures in the same type of discharges [19]. First effect corresponds to the gas heating at the beginning of the plasma pulse, whereas the second one reflects the equilibrium between the gas heating and heat dissipation and should be related to the vibrational-translational (VT) relaxation processes, as suggested in [19].…”
supporting
confidence: 68%
“…20 Figure 5 shows a comparison of the CO 2 conversion and energy efficiency in a MW plasma and DBD reactor as a function of SEI, as predicted by our model taking into account the CO 2 vibrational levels [49]. Note that the results of the MW plasma are obtained for a reduced pressure of 2660 Pa (20 Torr), as used in the experiments of [33,34], while the DBD results are for atmospheric pressure. Therefore, to compare both 25 discharges, we need to show them at the same SEI in eV/molec, because this is the most fundamental parameter for comparison.…”
Section: Faraday Discussion Accepted Manuscriptmentioning
confidence: 99%
“…This strategy has already been used for studies of pure gas phase but has never been applied for plasma discharge . Additionally, FTIR spectroscopy has been used as a probe to measure the gas temperature of the plasma using the rotational bands of the CO molecules generated in the plasma . The latter parameter is of prime importance to validate our approach based on vibrational spectroscopy.…”
Section: Introductionmentioning
confidence: 99%