“…In the mixed-composition case, the metal and the oxide parts were shown to be radially segregated with the oxide forming the core and the metalthe surface shell. 13,14,16,17 We assigned this segregation and structure to be driven by the relation between the cohesive energies of the metal and its oxide. Another reason for the coreshell geometry is that, in reactive sputtering, the vapour oxidation occurs mostly close to the target where the plasma is localized, and where dissociated and ionized oxygen is produced.…”