Titanium Dioxide Thin Films as Methane Gas Sensors

Comert, Buse; Akin, Nihan; Dönmez, Meltem; Saglam, Necdet; Özçelik, Süleyman

doi:10.1109/jsen.2016.2619860

Cited by 49 publications

(24 citation statements)

References 40 publications

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“…The researchers were demonstrated that the properties of the gas sensor depend on the surface morphology and the dopant concentrations added to TiO2 films. B. Comert [34] pointed out that the sensors fabricated from titanium dioxide thin film at high temperatures possess low sensitivity. This was due to the fact that, the grain size was not small enough to increase the surface area of the film's exposure to methane gas Joy Tan et al [35] 100 nm of un-doped TiO2 and doped with Au thin film were prepared, they were discovered that adding gold to titanium films led to a significantly increased sensitivity to carbon monoxide gas.…”

Section: H2 (Gas) +O -(Ads) ↔H2omentioning

confidence: 99%

Review on: TiO2 Thin Film as a Metal Oxide Gas Sensor

Rzaij

Abass

2020

J. Chem. Rev.

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Titanium dioxide is an important metal oxide semiconductor (MOSs) used in many electronic applications, the most famous of which are gas sensor applications. This review discusses the techniques used for preparing the TiO2 thin films and the effect of the crystalline phases in which this compound forms, on the gas sensing properties. There are three phases to crystallize titanium dioxides, brookite, anatase, and rutile phase. Amongst these varied phases of crystal, the greatest steady main phase is rutile. The phase of anatase and brookite are usually more stable than the rutile phase as the surface energy of them is less than that of the rutile. Therefore, the applications of sensing by anatase TiO2 and rutile TiO2 were fully studied. TiO2 characterizations were established on surface reactions using oxidizing or reducing gases, which; therefore, influences the conductivity of the film. Titanium dioxide gas sensors have healthier steadiness and sensitivity at high temperature compared with that of the other metal oxides. Surveys on titanium dioxide thin film applied in gas sensor devices used in a varied range of applications such as sensor devices, dye-sensitized solar cells, and catalysis. The gas sensor is a function of the crystal structure, particle size, morphology, and the method of synthesis. In this work, characteristic of the titanium dioxide films investigated using various techniques, as reported by many researchers. The aim of this study was to review previous studies through which the best properties can obtained to manufacture TiO2 gas sensor thin films with high sensitivity.

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Section: H2 (Gas) +O -(Ads) ↔H2omentioning

confidence: 99%

Review on: TiO2 Thin Film as a Metal Oxide Gas Sensor

Rzaij

Abass

2020

J. Chem. Rev.

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“…Kaplama sırasında büyütme veya kaplama sonrası tavlama işlemi uygulanarak filmlerin tanecik boyutu büyütülebilir. Büyük tanecik boyutu ise filmlerin direncinin düşmesini sağlar [10]. Önceki çalışmamızda, GZO ince filmleri n-Si alttaş üzerine 100-200 W RF gücünde magnetron püskürtme tekniği ile kaplanmış ve 200 W'da kaplanan filmin iyi opto-elektronik özelliklere sahip olduğu görülmüştür [11].…”

Section: Doiunclassified

n-Si ve PET alttaşlar üzerine RF-kaplanan GZO ince filmlere tavlama sıcaklığının etkileri

Sönmez¹,

Dönmez²,

Comert³

et al. 2019

Gazi Üniversitesi Mühendislik-Mimarlık Fakültesi Dergisi

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 GZO thin film was successfully grown at a particle size of 49.17 nm.  Flexible UV sensor with photo-sensitivity of 8.07 at 2V was fabricated.  The obtained sensor has a wide range of applications thanks to its flexibility (a) (b) Figure A. a) The fabricated GZO/PET UV sensor and (b) schematic demonstration. Purpose: Investigating the effects of annealing temperature on GZO thin films and producing a flexible UV sensor based on GZO thin films. Theory and Methods: GZO thin films were deposited on n-Si and flexible PET substrates with RF Magnetron Sputtering technique at room temperature. In order to observe the effect of annealing temperature, the GZO/n-Si thin film annealed from 100 °C to 600 °C, while the GZO/PET film annealed at 100 °C and 200 °C. The structural, morphological, optical and electrical properties of the films were investigated using XRD, AFM, UV-Vis Spectrometer and Hall effect measurement systems, respectively. The UV sensor fabrication of GZO/PET flexible sample annealed at 200 °C was completed with Au interdigital electrodes with a thickness of 150 nm. Sensitivity of the sensor was determined using I-V measurements in darkness and UV light. Results: The film annealed at 200 °C has the largest particle size of 49.17 nm, the widest Eg with 3.30 eV and the lowest surface resistance of 0.0027 Ωcm. For this reason, the UV sensor based on the flexible GZO/PET film which was annealed at 200 °C was fabricated and UV light photo-sensitivity of the sensor was determined with I-V measurements taken under dark and 365 nm wavelength UV light. The photo-sensitivity of the flexible UV sensor was found to be 8.07. Conclusion: Although the photosensitivity of the flexible GZO/PET based UV sensor is higher than many recent studies, it is thought that sensors with higher sensitivity can be produced by better optimizing the factors affecting the dark current during the sensor production phase.

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“…The change in conductivity in metal oxide gas sensors such as Titanium dioxide (TiO 2 ) is due to two factors: the change in carrier density or the change in bending of the energy band structure in the presence of gas [16]. The sensor mechanism of the bulk TiO 2 has been modeled in various forms [17][18][19][20][21].…”

Section: Introductionmentioning

confidence: 99%

Ammonia Room Temperature Gas Sensor Using Different TiO2 Nano-structure

Shooshtari

Salehi

2021

Preprint

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In this study, TiO2 Nano-structure were synthesized by three different processes including nanowires, nanoparticles and thin- films. The morphology and crystal structure of the three different TiO2 structures deposited on quartz glasses were characterized by XRD, SEM and FTIR. It has been found that nanowires and nanoparticles showed only the anatase phase while the thin-film exhibited both anatase and rutile phases. The three TiO2 Nano-structures were then used to fabricate gas sensors for ammonia (NH3) detection at different concentrations and various conditions. The samples fabricated with thin-film TiO2 towards 50 ppm NH3 showed a response value of 5% at room temperature, whereas the other two samples exhibited much higher values towards similar condition NH3 at room temperature. Samples with nanowires showed a three-fold increase and samples with nanoparticles exhibit a two-fold increase in response value. We have found that the response of all samples increases with elevating the operating temperature up to 200°C. Increasing the operating temperature improved the nanoparticle sensing conditions more than the other two samples. The samples using nanoparticles showed a 33% increase in response towards 50 ppm NH3 at 200°C compared to the samples with thin films at similar conditions. Further, response and recovery time were investigated and reported in this study.

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Titanium Dioxide Thin Films as Methane Gas Sensors

Cited by 49 publications

References 40 publications

Review on: TiO2 Thin Film as a Metal Oxide Gas Sensor

Review on: TiO2 Thin Film as a Metal Oxide Gas Sensor

n-Si ve PET alttaşlar üzerine RF-kaplanan GZO ince filmlere tavlama sıcaklığının etkileri

Ammonia Room Temperature Gas Sensor Using Different TiO2 Nano-structure

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