Titanium dioxide (TiO2) is an attractive material
for
planar photonics; thus, the fabrication of TiO2 micro-
and nanostructures has been a topic of many reports in recent years.
In this work, we have presented systematic studies on focused electron
beam (e-beam) micro- and nanopatterning of sol–gel-derived
layers based on different alkoxide precursors of TiO2 stabilized
with benzoylacetone (BzAc). The e-beam method is a flexible high-resolution
technique, whereas the use of the sol–gel process, which utilizes
precursors of titania in the condensed phase, enables lower electron
doses in comparison to gas-phase precursors from injection systems.
As the sol–gel process is relatively complex, we analyzed the
effect of different process parameters on the patterning. It has given
us insight into the phenomena related to the e-beam irradiation of
sol–gel-derived layers based on titanium alkoxide precursors.
We have examined patterned films using scanning and transmission electron
microscopy, energy-dispersive X-ray spectroscopy, ellipsometry, and
profilometry. We have shown that the role of the alkoxy chain length
in the processing of sol–gel-derived layers is more significant
in the case of alcohol solvents than titania precursors. Moreover,
high-resolution periodic nanostructures with steep sidewalls and high
aspect ratio can be patterned, especially when the molar ratio of
BzAc to titanium alkoxide in sol is increased from 1:1 to 2:1. Although
the patterned films have a high concentration of carbon, it can be
completely removed by annealing at 500 °C. This heat treatment
leads to an increase in the refractive index from 1.59 to 2.11 (at
the wavelength of 632.8 nm), but the patterned film turns polycrystalline
in the nanoscale, showing the anatase phase of TiO2. The
obtained results indicate that the investigated patterning method
can be potentially applied for direct writing of planar photonic components
with nanoscale features such as grating couplers for sensors. Nevertheless,
the fabrication of high-quality TiO2 structures still needs
optimization.