Titanium Dioxide Whispering Gallery Microcavities

Park, Junsoo; Özdemir, Şahin Kaya; Monifi, Faraz; Chadha, Tandeep S.; Huang, Steven H.; Biswas, Pratim; Yang, Lan

doi:10.1002/adom.201400107

Cited by 62 publications

(33 citation statements)

References 57 publications

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“…5b present a typical transmission spectrum of a flexible TiO 2 resonator, and an intrinsic Q-factor of 2 × 10 4 is fitted from the spectrum. The loss number and Q-factor is comparable to previously reported values in sol-gel devices: Park et al measured a propagation loss of 15 dB/cm and an intrinsic Q-factor of 2 × 10 4 in TiO 2 WGM resonators near 1550 nm wavelength 24 .…”

Section: Flexible Photonic Devices On Plastic Substratessupporting

confidence: 87%

Substrate-blind photonic integration based on high-index glass materials

Lin

Zou

et al. 2014

SPIE Proceedings

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Conventional photonic integration technologies are inevitably substrate-dependent, as different substrate platforms stipulate vastly different device fabrication methods and processing compatibility requirements. Here we capitalize on the unique monolithic integration capacity of composition-engineered non-silicate glass materials (amorphous chalcogenides and transition metal oxides) to enable multifunctional, multi-layer photonic integration on virtually any technically important substrate platforms. We show that high-index glass film deposition and device fabrication can be performed at low temperatures (< 250 °C) without compromising their low loss characteristics, and is thus fully compatible with monolithic integration on a broad range of substrates including semiconductors, plastics, textiles, and metals. Application of the technology is highlighted through three examples: demonstration of high-performance mid-IR photonic sensors on fluoride crystals, direct fabrication of photonic structures on graphene, and 3-D photonic integration on flexible plastic substrates.

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Section: Flexible Photonic Devices On Plastic Substratessupporting

confidence: 87%

Substrate-blind photonic integration based on high-index glass materials

Lin

Zou

et al. 2014

SPIE Proceedings

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“…The choice of resonator material is hence also a crucial factor in sensor design, motivating the search for novel materials as a means to improve sensor performance and cost. Recent developments in this context for sensing purposes include the use of titanium dioxide (TiO 2 ) [58], silicon nitride (Si 2 N 3 ) [59], silicon carbide (SiC) [60], hydrogenated amorphous silicon [61], poly(methyl methacrylate) (PMMA) [47], polydimethylsiloxane (PDMS) [62], magnesium fluoride (MgF 2 ) [63,64], sapphire [65,66], and liquid (paraffin oil) droplets [67,68]. Composite resonators, such as coated spheres, and hybrid metallo-dielectric resonators, have also recently been investigated as a route to improving sensor robustness and signal enhancement, e.g., [69–72].…”

Section: Theory Of Whispering Gallery Mode Sensingmentioning

confidence: 99%

Whispering gallery mode sensors

2015

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We present a comprehensive overview of sensor technology exploiting optical whispering gallery mode (WGM) resonances. After a short introduction we begin by detailing the fundamental principles and theory of WGMs in optical microcavities and the transduction mechanisms frequently employed for sensing purposes. Key recent theoretical contributions to the modeling and analysis of WGM systems are highlighted. Subsequently we review the state of the art of WGM sensors by outlining efforts made to date to improve current detection limits. Proposals in this vein are numerous and range, for example, from plasmonic enhancements and active cavities to hybrid optomechanical sensors, which are already working in the shot noise limited regime. In parallel to furthering WGM sensitivity, efforts to improve the time resolution are beginning to emerge. We therefore summarize the techniques being pursued in this vein. Ultimately WGM sensors aim for real-world applications, such as measurements of force and temperature, or alternatively gas and biosensing. Each such application is thus reviewed in turn, and important achievements are discussed. Finally, we adopt a more forward-looking perspective and discuss the outlook of WGM sensors within both a physical and biological context and consider how they may yet push the detection envelope further.

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“…Hydrogenated amorphous silicon (a-Si:H) has also been used due its high refractive index (~3.5), low loss compared to crystalline SOI, and versatility in fabrication, as it can be deposited at lower temperatures(≤ 300°C) (72). Titanium oxide (TiO 2 ) is a useful material for WGM sensors due to low absorption in the visible and infrared wavelengths, a low thermal expansion coefficient, a negative thermo-optic coefficient, biocompatibility, and compatibility with CMOS microfabrication (73). Barium-titanate (BaTiO 3 ) microspheres have also been used for sensing, offering non-optical advantages in terms of being able to perform measurements in small volumes (10 μL), commercial availability, and facile surface functionalization methods (64, 65).…”

Section: Design Of Optical Resonator Sensorsmentioning

confidence: 99%

Applications of Optical Microcavity Resonators in Analytical Chemistry

Wade

Bailey

2016

Annual Rev. Anal. Chem.

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Optical resonator sensors are an emerging class of analytical technologies that use recirculating light confined within a microcavity to sensitively measure the surrounding environment. Bolstered by advances in microfabrication, these devices can be configured for a wide variety of chemical or biomolecular sensing applications. The review begins with a brief description of optical resonator sensor operation followed by discussions regarding sensor design, including different geometries, choices of material systems, methods of sensor interrogation, and new approaches to sensor operation. Throughout, key recent developments are highlighted, including advancements in biosensing and other applications of optical sensors. Alternative sensing mechanisms and hybrid sensing devices are then discussed in terms of their potential for more sensitive and rapid analyses. Brief concluding statements offer our perspective on the future of optical microcavity sensors and their promise as versatile detection elements within analytical chemistry.

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Titanium Dioxide Whispering Gallery Microcavities

Cited by 62 publications

References 57 publications

Substrate-blind photonic integration based on high-index glass materials

Substrate-blind photonic integration based on high-index glass materials

Whispering gallery mode sensors

Applications of Optical Microcavity Resonators in Analytical Chemistry

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