2014
DOI: 10.1063/1.4871702
|View full text |Cite
|
Sign up to set email alerts
|

Titanium in silicon: Lattice positions and electronic properties

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1

Citation Types

2
15
0

Year Published

2015
2015
2022
2022

Publication Types

Select...
3
3
1

Relationship

1
6

Authors

Journals

citations
Cited by 21 publications
(17 citation statements)
references
References 29 publications
2
15
0
Order By: Relevance
“…References [6,7,9] also reported intermediate band gap levels between EV + 0.51 eV and EV + 0.55 eV. CTLs were also predicted within the framework of Density Functional Theory (DFT) [3,[12][13][14] and the parametrized method DFT+U [15], in fair agreement with most experimental measurements. In the context of standard DFT, however, there is no grounded theoretical foundation for an accurate prediction of CTLs.…”
Section: Introductionsupporting
confidence: 65%
“…References [6,7,9] also reported intermediate band gap levels between EV + 0.51 eV and EV + 0.55 eV. CTLs were also predicted within the framework of Density Functional Theory (DFT) [3,[12][13][14] and the parametrized method DFT+U [15], in fair agreement with most experimental measurements. In the context of standard DFT, however, there is no grounded theoretical foundation for an accurate prediction of CTLs.…”
Section: Introductionsupporting
confidence: 65%
“…To date, we have shown this effect to occur for two of the three transition metals discussed so far in this paper, titanium and vanadium, when excess vacancies are introduced by implantation . For both of these metals, displacement to the substitutional site has been observed in float zone silicon implanted with metal ions after annealing at high temperature.…”
Section: Lattice Site Changes As a Route For Reduced Recombinationmentioning
confidence: 68%
“…At this site, these atoms have a significantly lower diffusivity, accounting for the discrepancy in redistribution between the two materials. It was also concluded that as no further evidence of electrical activity was observed either in capacitance‐voltage measurements or in DLTS that the TM atoms are electrically inactive at this site .…”
Section: Lattice Site Changes As a Route For Reduced Recombinationmentioning
confidence: 99%
“…One should notice that the Ti-related defects observed in Ref. 16 were shown to anneal out already at 650 C, whereas higher annealing temperatures (around 900-1100 C) were reported for the double donor Ti-related defect (H180) in p-type Si. 11 The discrepancy in annealing temperatures could be a result of the modification of the nearest neighborhood of the Ti-related defects by the implantation with heavy ions.…”
mentioning
confidence: 84%
“…Recently, Markevich et al 16 studied float-zone (FZ) Si after implantation with Ti ions and subsequent annealing at 650 or 800 C. By comparing secondary ion mass spectroscopy and DLTS depth profiles electrically active substitutional Ti species were excluded to appear in Si. The three dominant DLTS peaks observed in that study were attributed to the single acceptor, the single donor, and the double donor of interstitial Ti.…”
mentioning
confidence: 99%