Titanium isotropic and anisotropic etching for MEMS applications

Ettouri, Rim; Tillocher, Thomas; Lefaucheux, Philippe; Boutaud, Bertrand; Phung, J.; Philippe, Hadrien; Dussart, Rémi

doi:10.1109/dtip54218.2021.9568501

Cited by 1 publication

(2 citation statements)

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“…[21] Ettouri et al have presented the technology of surface modification of titanium through a fluorine-based reactive ion etching (RIE) process, where the bulk Ti was etched in an inductively coupled plasma using a mixture of SF 6 , O 2 , and Ar. [22] Depending on the process parameters (e.g., self-bias voltage, gas flow rates), the authors obtained various etch rates and titanium trenches of different width. The obtained results indicate that trenches of varying profiles can be formed by balancing the fluorine radical-assisted isotropic etching, the O 2 passivation film, and the physical Ar ions bombardment.…”

Section: Introductionmentioning

confidence: 99%

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Influence of the Chemical Composition and Topography of the Ti6Al7Nb Surface Etched in Fluorine Plasma on Its Selected Properties

2023

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Herein, a new way of the surface modification of Ti6Al7Nb alloy in fluorine plasma is presented using the mask made of stainless steel and its influence on the selected properties, including chemical composition, topography, and tribological ones. Depending on the etching process parameters, different characteristics of the surfaces are obtained. The higher is the value of the negative bias, the less fluorine concentration on the etched surface and higher etching rates. Etching using the SF6 gas shows bigger etching rates in comparison to the etching using the CF4 gas. Chemical composition of the modified surfaces shows greater impact on tribological characteristics than topography parameters. The lowest wear rate is observed for the sample modified using the CF4 gas.

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Section: Introductionmentioning

confidence: 99%

“…The following examples should be listed here: titanium and its alloys, titanium nitride, yttrium fluoride film, silicone rubber. [ 22–26 ] However, all published studies do not exhaust the issue and do not reveal the potential of this modification method.…”

Section: Introductionmentioning

confidence: 99%