TiO 2 (rutile) thin films were deposited via a hydrothermal process by adjusting the amount of ethanol, deposition time, and temperature. Especially, various amounts of ethanol generated different degrees of supersaturation in precursor solution. It allowed us to systematically change the width, lengths, and crystallinity of a vertically aligned 1-D nanorod structure of TiO 2 films. The oriented attachment, confirmed by scanning electron microscopy and transmission electron microscopy, was shown to be responsible for their lateral growth of TiO 2 nanorods bundled by numerous well-oriented nanowires and their vertical growth. TiO 2 nanorod thin films were also characterized via X-ray diffraction and UV-Vis-NIR spectrophotometer to find a correlation between the process conditions and nanostructural evolution. Dye sensitized solar cells were assembled to relate the nanostructures of TiO 2 films with the effectiveness of its role as a photoelectrode. with a low temperature process that benefits certain applications using temperature-sensitive substrates.In our previous studies, TiO 2 nanostructures were systematically controlled by the calculated degree of supersaturation (s). Different phases of TiO 2 (anatase, rutile, amorphous) and shapes of the nanostructures (leaf, tree, and particle) were prepared by the CBD process via a wide range of degrees of supersaturation (s = 70-200).8 At very low degree of supersaturation (s ≤ 70), the crystallinity of TiO 2 nanostructures (nanoblades and nanorods) was dramatically improved. 9 In particular, vertically aligned rutile nanorods were grown on the fluorine-doped tin oxide (FTO) surfaces when hydrothermal processing was employed to generate lower supersaturations (s ≤ 15). 9 Gradual lateral growth as well as rapid vertical growth of the nanorods was observed. Incomplete oriented attachment (OA) of nanoparticles was suggested to be responsible for such growth as the fully grown nanorods were not a single crystal.