We report on photoluminescence in the 1:7-2:1 μm range of silicon doped with thulium. This is achieved by the implantation of Tm into silicon that has been codoped with boron to reduce the thermal quenching. At least six strong lines can be distinguished at 80 K; at 300 K, the spectrum is dominated by the main emission at 2 μm. These emissions are attributed to the trivalent Tm 3þ internal transitions between the first excited state and the ground state. © 2011 Optical Society of America OCIS codes: 250.5230, 140.3070, 160.5690, 160.6000. Light emission in the eye-safe 2 μm region is of considerable interest, in particular for medical applications, but also for gas sensing systems and direct free space optical communications. Although 2 μm Tm lasers are now commercially available [1], they are fabricated only in insulating crystals and fiber materials and as a result can be pumped only optically. To achieve electrical pumping, a semiconductor host is required. Because competing radiative transitions across the bandgap are detrimental, indirect rather than direct gap semiconductors are the preferred host, and of these, silicon is by far the most technologically important. In addition, loss mechanisms such as two-photon absorption are reduced by orders of magnitude in indirect rather than direct gap transitions because of the need for the involvement of phonons to conserve momentum. The incorporation of rare-earth (RE) elements into semiconductors, crystals, and glass fibers has been extensively used as optical sources in such materials. The optical transitions that originate from the RE partially filled inner 4f shell are sharp and generally insensitive to the host and temperature variations and can enable light emission throughout the visible to the IR regions. Among the RE elements, thulium is a particularly interesting optical source. The transitions between the three Tm 3þ lower excited states ( 3 H 4 , 3 H 5 , and 3 F 4 ) and the ground state ( 3 H 6 ) can lead to light emission in the 0.8, 1.2, and 2:0 μm regions [2]. Luminescence in the 1:2 μm range has been observed in silicon substrates incorporating Tm, and a Tm:Si-based LED operating at low forward bias has been demonstrated [3,4]. Light emission in the 0:8-2:0 μm range from III-V substrates doped with Tm has also been shown-a summary of previously published work can be found in [3]. A Tm:YAG laser operating at 2 μm was first demonstrated in 1965 [5] and has led to commercial lasers being fabricated in a variety of host crystals and fiber materials [1]. In this Letter, we report on photoluminescence (PL) in the 1:7-2:1 μm region from silicon substrates doped with Tm.Samples were fabricated by ion implantation of 10 13 Tm cm −2 at 400 keV into an n-type Si [100] substrate (2-7 Ω cm) previously implanted with 10 15 B cm −2 at 30 KeV. Subsequently samples were annealed in a nitrogen atmosphere at 850°C for 1, 5, and 15 min. As a reference, Tm was also implanted at the same dose and energy into a Si substrate that did not contain boron and subsequentl...