Highly ordered TiO 2 nanotube arrays were fabricated by anodic oxidation of titanium thin film in organic electrolyte containing ammonium fluoride and water. The effect of electrolyte composition as well as sputter deposition parameters of titanium thin film on morphology of nanotubes was observed by scanning electron microscopy (SEM) and surface chemical analysis by X-ray photoelectron spectroscopy (XPS). The electrolyte composition was optimized to reach the balance between anodic oxidation and chemical etching of initial oxide barrier layer, leading to freestanding and highly ordered open nanotubes with lengths in the range of 400-800 nm. Further these surfaces of nanostructured titania may be easily decorated with broad spectrum of nanoparticles or various functional materials according to required applications.
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