2011
DOI: 10.1364/ol.36.002898
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Top-down approach to fiber-top cantilevers

Abstract: Taking inspiration from conventional top-down micromachining techniques, we have fabricated a low mass gold fiber-top cantilever via align-and-shine photolithography. The cantilever is characterized by measuring its resonance frequency and mechanical quality factor. Our results show that the device grants mass sensitivity comparable to that reported for similar standard cantilevers. This proof-of-concept paves the way to series production of highly sensitive fiber-top devices for remote detection of biochemica… Show more

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Cited by 25 publications
(18 citation statements)
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“…After the identification and assessment of the initial fabrication routes, research attention focused on devices with new functionalities and unparalleled performance. Successful integrations onto the optical fibers of plasmonic nanostructures [ 36 , 37 ], photonic crystals [ 38 ], ring resonators [ 39 ], optomechanical microcavities [ 40 ], metallodielectric nanoarchitectures [ 41 , 42 , 43 ], and dielectric block surface-wave resonators [ 44 ] were recently reported. These first proofs of concept provide the basis for the development of multifunctional LOF platforms, such as plasmonic label-free optical fiber nanosensors [ 43 , 45 , 46 ], SERS nanoprobes [ 33 , 47 ], advanced photonic nanoresonators [ 39 , 44 ], ultrahigh-sensitivity acoustic transducers [ 48 ], optical fiber tweezers [ 49 , 50 ], and optical fiber metatips [ 51 ].…”
Section: Lab-on-fiber Concept: a Technological Roadmapmentioning
confidence: 99%
“…After the identification and assessment of the initial fabrication routes, research attention focused on devices with new functionalities and unparalleled performance. Successful integrations onto the optical fibers of plasmonic nanostructures [ 36 , 37 ], photonic crystals [ 38 ], ring resonators [ 39 ], optomechanical microcavities [ 40 ], metallodielectric nanoarchitectures [ 41 , 42 , 43 ], and dielectric block surface-wave resonators [ 44 ] were recently reported. These first proofs of concept provide the basis for the development of multifunctional LOF platforms, such as plasmonic label-free optical fiber nanosensors [ 43 , 45 , 46 ], SERS nanoprobes [ 33 , 47 ], advanced photonic nanoresonators [ 39 , 44 ], ultrahigh-sensitivity acoustic transducers [ 48 ], optical fiber tweezers [ 49 , 50 ], and optical fiber metatips [ 51 ].…”
Section: Lab-on-fiber Concept: a Technological Roadmapmentioning
confidence: 99%
“…Subsequently, the same group proposed the use of a borosilicate glass ferrule to fabricate a cantilever suspended on the OF tip using a ps-laser ablation tool 26 , 27 . In addition, a top-down approach via align-and-shine photolithography 28 was proposed to fabricate low-mass gold fibre-top cantilevers. Following these technological improvements, a wide variety of sensors has been demonstrated 29 33 .…”
Section: Introductionmentioning
confidence: 99%
“…However, in some fabrication methodologies finesse can be enhanced through use of additional coatings. The physical fabrication approaches reported thus far have included picosecond-laser machining [4], focused ion beam [9], wire-cut micromachining [6] and photolithography [10].…”
Section: Introductionmentioning
confidence: 99%