Top-down fabrication of high-uniformity nanodiamonds by self-assembled block copolymer masks

Zheng, Jiabao; Lienhard, Benjamin; Doerk, Gregory S.; Cotlet, Mircea; Bersin, Eric; Kim, Harrison Sejoon; Byun, Youngchul; Nam, Chang‐Yong; Kim, Jiyoung; Black, Charles T.; Englund, Dirk

doi:10.1038/s41598-019-43304-5

Cited by 14 publications

(15 citation statements)

References 71 publications

(97 reference statements)

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“…Finally, the resist mask is removed (v). The isotropic under-etching method in which a combination of anisotropic and isotropic oxygen etching (at elevated temperature) creates free standing nano-structures [ 34 , 35 , 36 ]. A hard mask pattern (SiN) is transferred into SCD (i).…”

Section: Photonic Componentsmentioning

confidence: 99%

“…Subsequently quasi-isotropic oxygen etching is carried out to undercut the nanobeam structure (iv) and wet etching of hard mask to obtain free-standing nanobeam structure over bulk diamond (v). Figures reprinted (adapted) from [ 34 , 36 ], for Ref. [ 34 ] with the permission of AIP Publishing; for Ref [ 36 ] under creative commons license CC BY 4.0.…”

Section: Figurementioning

confidence: 99%

“…Figures reprinted (adapted) from [ 34 , 36 ], for Ref. [ 34 ] with the permission of AIP Publishing; for Ref [ 36 ] under creative commons license CC BY 4.0.…”

Section: Figurementioning

confidence: 99%

See 2 more Smart Citations

Recent Advances in Single Crystal Diamond Device Fabrication for Photonics, Sensing and Nanomechanics

2020

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In the last two decades, the use of diamond as a material for applications in nanophotonics, optomechanics, quantum information, and sensors tremendously increased due to its outstanding mechanical properties, wide optical transparency, and biocompatibility. This has been possible owing to advances in methods for growth of high-quality single crystal diamond (SCD), nanofabrication methods and controlled incorporation of optically active point defects (e.g., nitrogen vacancy centers) in SCD. This paper reviews the recent advances in SCD nano-structuring methods for realization of micro- and nano-structures. Novel fabrication methods are discussed and the different nano-structures realized for a wide range of applications are summarized. Moreover, the methods for color center incorporation in SCD and surface treatment methods to enhance their properties are described. Challenges in the upscaling of SCD nano-structure fabrication, their commercial applications and future prospects are discussed.

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Section: Photonic Componentsmentioning

confidence: 99%

Section: Figurementioning

confidence: 99%

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Recent Advances in Single Crystal Diamond Device Fabrication for Photonics, Sensing and Nanomechanics

2020

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“…To improve the understanding of the function of nano‐ and micro‐structured surfaces, as well as the limitations of these structures, extensive research has been carried out in imparting nanoscale topographies onto synthetic materials. [ 1–41 ] In particular, synthetic nanostructured surfaces significantly benefit many interdisciplinary fields including biomaterial engineering, antibacterial and antibiofouling, optics, controlling mammalian cell behavior and differentiation, and intracellular drug delivery. [ 2,8,14,18,41 ]…”

Section: Introductionmentioning

confidence: 99%

High Aspect Ratio Polymeric Nanoneedle Arrays

McCormack

Podhorska

Delaney

et al. 2021

Macro Materials & Eng

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High aspect ratio (HAR) nanoneedle arrays can be used to tune the intrinsic properties of substrates such as their wettability and reflectivity. Here, a simple and scalable fabrication method for producing dense arrays of freestanding polyethylene glycol (PEG) nanoneedles with sub 50 nm tips and surface coverage up to 83 needles per µm2 is presented. Two distinct sets of silicon nanoneedle master arrays with base diameters between 15 and 265 nm and heights between 146 and 613 nm are fabricated using block copolymer micelle lithography. Replication of selected silicon masters using photocurable polymers produces HAR PEG nanoneedle arrays with feature base diameters ranging between 15 and 292 nm and heights between 133 and 656 nm. At their maximum, the aspect ratio of the pillars is 4.6. PEG nanoneedle arrays are produced using polymers with two different molecular weights as well as two different photoinitiators, showing the versatility of the process.

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“…Recently, an interesting prospect to control nitrogen doping during NDs synthesis was proposed, consisting of chemical vapor deposition (CVD) at a moderate level of N 2 [31]. Furthermore, other top-down fabrication methods were demonstrated, based on a combination of CVD and plasma etching, leading to the formation of single-crystal NDs with uniform size of 30.0 ± 5.4 nm [32] and nanoscale cylindrical (down to 100 nm diameter and 500 nm height) diamond particles [33]. Of great importance for sensing applications is the production of NDs with a highly dense NV ensemble to increase detection efficiency.…”

Section: Introductionmentioning

confidence: 99%

Laser-Synthesis of NV-Centers-Enriched Nanodiamonds: Effect of Different Nitrogen Sources

et al. 2020

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Due to the large number of possible applications in quantum technology fields—especially regarding quantum sensing—of nitrogen-vacancy (NV) centers in nanodiamonds (NDs), research on a cheap, scalable and effective NDs synthesis technique has acquired an increasing interest. Standard production methods, such as detonation and grinding, require multistep post-synthesis processes and do not allow precise control in the size and fluorescence intensity of NDs. For this reason, a different approach consisting of pulsed laser ablation of carbon precursors has recently been proposed. In this work, we demonstrate the synthesis of NV-fluorescent NDs through pulsed laser ablation of an N-doped graphite target. The obtained NDs are fully characterized in the morphological and optical properties, in particular with optically detected magnetic resonance spectroscopy to unequivocally prove the NV origin of the NDs photoluminescence. Moreover, to compare the different fluorescent NDs laser-ablation-based synthesis techniques recently developed, we report an analysis of the effect of the medium in which laser ablation of graphite is performed. Along with it, thermodynamic aspects of the physical processes occurring during laser irradiation are analyzed. Finally, we show that the use of properly N-doped graphite as a target for laser ablation can lead to precise control in the number of NV centers in the produced NDs.

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Top-down fabrication of high-uniformity nanodiamonds by self-assembled block copolymer masks

Cited by 14 publications

References 71 publications

Recent Advances in Single Crystal Diamond Device Fabrication for Photonics, Sensing and Nanomechanics

Recent Advances in Single Crystal Diamond Device Fabrication for Photonics, Sensing and Nanomechanics

High Aspect Ratio Polymeric Nanoneedle Arrays

Laser-Synthesis of NV-Centers-Enriched Nanodiamonds: Effect of Different Nitrogen Sources

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