2010
DOI: 10.1002/pssc.200982440
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Top gated graphene transistors with different gate insulators

Abstract: Top gated graphene field effect transistors with AlN and Si3N4 gate insulator materials were fabricated by plasma assisted deposition. Transistors with an AlN top gate insulator showed a reduced mobility and channel carrier density, whereas for the transistors with Si3N4 dielectric an increase of the mobility and a decrease of the channel carrier density was observed. The reduced carrier density can be explained by bond formation between the insulator and the graphene sheets. The different behaviour of the car… Show more

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Cited by 13 publications
(9 citation statements)
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“…Indeed, device engineers soon started research on exploiting graphene for electronic devices, most notably FETs (field‐effect transistor) with large‐area graphene channels. The first graphene MOSFET (metal‐oxide‐semiconductor FET) has been demonstrated in 2007 and many groups started investigating graphene transistors, see, e.g . and the surveys of graphene transistors provided in Refs.…”
Section: Introductionmentioning
confidence: 99%
“…Indeed, device engineers soon started research on exploiting graphene for electronic devices, most notably FETs (field‐effect transistor) with large‐area graphene channels. The first graphene MOSFET (metal‐oxide‐semiconductor FET) has been demonstrated in 2007 and many groups started investigating graphene transistors, see, e.g . and the surveys of graphene transistors provided in Refs.…”
Section: Introductionmentioning
confidence: 99%
“…This has been explained as consequence of greater screening of the charged impurities by the metal gate [17]. In every instance that we know of [16,[18][19][20][21], the deposition of an oxide layer on high-mobility, non-epitaxial SLG has lead to a mobility decrease, probably as a result of more CI and defect scattering. Thus, it is surprising to observe a several-fold improvement for SLM.…”
Section: Introductionmentioning
confidence: 99%
“…However, in most graphene-based heterostructures, SLG must be physically supported by an insulating dielectric substrate such as SiO 2 , and the carrier mobility in such structures is about one order of magnitude lower [1] as a result of scattering with impurities, defects, and surface roughness. This reduction in carrier mobility can be further exacerbated when a top gate, consisting of a layer of high-κ dielectric material such as HfO 2 or Al 2 O 3 overlayed with metal, is deposited on SLG [2][3][4].…”
mentioning
confidence: 99%