Topography measurement and reconstruction of inner surfaces based on white light interference

Dong, Yuchu; Li, Zexiao; Zhu, Linlin; Zhang, Xiaodong

doi:10.1016/j.measurement.2021.110199

Cited by 26 publications

(2 citation statements)

References 22 publications

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“…Interferometry is a high-precision and high-efficiency non-contact measurement method, which has been widely used in the fields of materials, machinery and semiconductors. Compared with monochromatic light interferometry, white light interferometry has the advantages of large range and high accuracy, so it is widely adopted [2][3][4][5][6][7][8][9] . Currently, white light interferometry usually adopts the vertical scanning method to measure the surface topography of samples, which is suitable for laboratory environments and parametric measurements of small samples.…”

Section: Introductionmentioning

confidence: 99%

Miniature interferometry systems

Zhao,

Zhu

2024

Sixth Conference on Frontiers in Optical Imaging and Technology: Novel Imaging Systems

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This thesis presents a miniature interferometric system designed to realize high-precision non-contact measurements of micro- and nanostructures on samples to be tested. Traditional interferometric systems mainly use vertical scanning interferometry, which is usually limited to the measurement of small samples in laboratory scenarios. In order to meet diversified measurement needs, we have developed a compact, small and portable micro interferometry system, which consists of modules such as a light source and illumination system, an imaging system, a PZT displacement system, and a micro-reflector stylus. With this system, the vertical measurement space can be reduced to less than 1mm. We also employ algorithms such as multi-step phase shift and envelope curve fitting to achieve high precision measurements with an error of less than 1%.

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Section: Introductionmentioning

confidence: 99%

Miniature interferometry systems

Zhao,

Zhu

2024

Sixth Conference on Frontiers in Optical Imaging and Technology: Novel Imaging Systems

View full text Add to dashboard Cite

show abstract

“…In recent years, some researchers investigated the influence of random noise and proposed various frequency domain filtering processes to suppress the noise of correlogram, such as Window Fourier denoising method(WFD) [8], Variation mode-decomposition windowed fourier filtering (VMD-WFF) denoising method [9] and Wiener filtering method [10]. These methods can suppress the noise and improve the measurement accuracy to a certain extent.…”

Section: Introductionmentioning

confidence: 99%