Realization of the quantum anomalous Hall (QAH) effect has been demonstrated in several magnetic topological insulators (MTIs). MTIs can be synthesized by doping magnetic elements into topological insulators (TIs) [1][2][3][4][5][6][7][8][9] or growth of intrinsic MTI compounds. [10][11][12][13][14][15][16][17][18][19] However, these MTI materials require temperatures much lower than their magnetic T c to achieve quantization in the Hall effect. This deficiency has been attributed to inhomogeneity in magnetic doping which causes localized variation in surface state exchange gaps. Magnetism can also be induced in the surface of TI thin films via proximity exchange effect. This proximity induced magnetization (PIM) is envisioned by coupling TIs with a magnetic insulator (MI). PIM in TIs have been experimentally confirmed in heterostructures of TIs with magnetic insulators (MIs) such as rare earth garnets and EuS, [20][21][22][23][24][25][26][27][28] MTIs, [29,30] and telluride van der Waals (vdW) magnets. [31] However, recent studies have pointed out the complexities in measuring proximity exchange in these systems, [31] which can be affected by a number of problems such as diffusion at the interface and band bending. Thus, providing a barrier for diffusion while permitting magnetic exchange in TI/MI heterostructures will be necessary for devices, and it is shown here that a TiO x interface barrier achieves this goal. Only a single study by Watanabe et al. [31] has shown PIM and QAH in a TI/MI/TI thin film sandwich structure of (Zn,Cr)Te/(Bi,Sb) 2 Te 3 /(Zn,Cr)Te. However, even in this material system, the QAH effect was seen at extremely low temperature of 0.03 K. This low temperature is possibly due to: (1) High-quality MIs which were grown on TI thin films have very low Curie temperature, T c , such as (Zn,Cr) Te with T c < 40 K [31] and EuS with T c of ≈17 K. [25] (2) Even with 20-25% of the magnetic species, Cr in (Zn,Cr)Te, finite localized nonmagnetic nanoregions may exist in the samples.MIs such as rare-earth garnets and ferrites are excellent materials that are magnetically ordered well above room-temperature, making them ideal candidates for QAH materials coupled with TIs. However, growth of MIs on top of TIs using Combining topological insulators (TIs) and magnetic materials in heterostructures is crucial for advancing spin-based electronics. Magnetic insulators (MIs) can be deposited on TIs using the spin-spray process, which is a unique nonvacuum, low-temperature growth process. TIs have highly reactive surfaces that oxidize upon exposure to atmosphere, making it challenging to grow spinspray ferrites on TIs. In this work, it is demonstrated that a thin titanium capping layer on TI, followed by oxidation in atmosphere to produce a thin TiO x interfacial layer, protects the TI surface, without significantly compromising spin transport from the magnetic material across the TiO x to the TI surface states. First, it is demonstrated that in Bi 2 Te 3 /TiO x /Ni 80 Fe 20 heterostructures, TiO x provides an e...