Topology optimization of 2D in-plane single mass MEMS gyroscopes

Abstract

 Users may download and print one copy of any publication from the public portal for the purpose of private study or research.  You may not further distribute the material or use it for any profit-making activity or commercial gain  You may freely distribute the URL identifying the publication in the public portal If you believe that this document breaches copyright please contact us providing details, and we will remove access to the work immediately and investigate your claim.

Topology optimization of MEMS resonators with target eigenfrequencies and modes

“…Following the observation from [41,25], good approximate solutions of Eq. ( 2) can be obtained with reduced computational cost, assuming that the first natural modes are mainly associated with quasi-rigid motions of the proof masses and quasi-static deformations of the suspending/coupling structures, with negligible effects of their internal dynamics.…”

“…In order to formulate the geometric (a) Smoothed Heaviside function (̃ , , ) in Eq. ( 11) (redrawn from [41]).…”

“…In a recent publication, the authors presented a topology optimization methodology for MEMS resonators, tailored for the design of MEMS gyroscopes [41]. The focus was on method development and the design task was confined to the suspending structure of single mass resonators limited to in-plane 2D dynamics.…”

“…The focus of the present paper is to extend the topology optimization approach developed in [41] to the design of industrially relevant MEMS resonators. More general planar structures employing suspended proof masses or plates are therefore here addressed, and their complete 3D dynamics are considered.…”

Rapid Prototyping of Inertial MEMS Devices through Structural Optimization

“…Topology optimization techniques that do not require any initial layout parametrization are also gaining traction in the field, mainly due to their ability of exploring non-intuitive design spaces [ 21 ]. This approach has recently been applied to a broad range of relevant MEMS resonator design cases [ 22 , 23 , 24 , 25 , 26 ], including MEMS gyroscopes [ 27 ]. However, topology optimization is still not mature enough to forecast its integration in the MEMS industry in the very near future.…”