Torsion balance-based system for high-precision force measurement in horizontal plane: part II. Static and dynamic improvement

Yan, Na; Vasilyan, Suren; Fröhlich, Thomas

doi:10.1088/1361-6501/ab05aa

Cited by 4 publications

(2 citation statements)

References 21 publications

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“…4.2), methods for direct and indirect calibration of the self-actuated MEMS probes have to be identified and are currently being investigated. The long-term goal is the development of MEMS probes that measure forces and displacements and are self-calibrating in situ [78]. With both the cantilever calibration system and calibrated cantilevers/ probes, the implementation and investigation of calibrations on reference marks of known geometries and material properties on the object itself are targeted, taking advantage of the high positioning accuracy of the NPM machines.…”

Section: Dynamics and Traceabilitymentioning

confidence: 99%

Tip- and Laser-based 3D Nanofabrication in Extended Macroscopic Working Areas

et al. 2021

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The field of optical lithography is subject to intense research and has gained enormous improvement. However, the effort necessary for creating structures at the size of 20 nm and below is considerable using conventional technologies. This effort and the resulting financial requirements can only be tackled by few global companies and thus a paradigm change for the semiconductor industry is conceivable: custom design and solutions for specific applications will dominate future development (Fritze in: Panning EM, Liddle JA (eds) Novel patterning technologies. International society for optics and photonics. SPIE, Bellingham, 2021. 10.1117/12.2593229). For this reason, new aspects arise for future lithography, which is why enormous effort has been directed to the development of alternative fabrication technologies. Yet, the technologies emerging from this process, which are promising for coping with the current resolution and accuracy challenges, are only demonstrated as a proof-of-concept on a lab scale of several square micrometers. Such scale is not adequate for the requirements of modern lithography; therefore, there is the need for new and alternative cross-scale solutions to further advance the possibilities of unconventional nanotechnologies. Similar challenges arise because of the technical progress in various other fields, realizing new and unique functionalities based on nanoscale effects, e.g., in nanophotonics, quantum computing, energy harvesting, and life sciences. Experimental platforms for basic research in the field of scale-spanning nanomeasuring and nanofabrication are necessary for these tasks, which are available at the Technische Universität Ilmenau in the form of nanopositioning and nanomeasuring (NPM) machines. With this equipment, the limits of technical structurability are explored for high-performance tip-based and laser-based processes for enabling real 3D nanofabrication with the highest precision in an adequate working range of several thousand cubic millimeters.

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Section: Dynamics and Traceabilitymentioning

confidence: 99%

Tip- and Laser-based 3D Nanofabrication in Extended Macroscopic Working Areas

et al. 2021

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“…Because of its contact-less and intelligent controlling characteristics, the Lorentz force drive [1,2] and measurement technology [3][4][5] based on electromagnetic induction yields * Author to whom any correspondence should be addressed. significant industrial application prospects, Since Shercliff and Thess.…”

Section: Introductionmentioning

confidence: 99%

A dynamic method for online measurement and calibrating with Lorentz force velocimetry

Zheng,

Li,

Guo

et al. 2024

Meas. Sci. Technol.

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Our previous study [1-2] reports a non-invasive in-situ measurement technology using Lorentz force velocimetry to quantitatively measure the meniscus velocity of molten steel online. However, effective signal recognition from complex environment noise and determination of zero-point calibration in harsh metallurgical processing is an essentially challenging task and indeed needs further exploration. In this paper, a method of combining double probe arrangement with real-time differential processing technology was proposed, the twin design structure not only enables the measurement of ~mN Lorentz forces, but also has significant characteristics of environmental tolerance. The Lorentz force signal caused by conductor motion can be accurately calculated through a differential method, meaning that the problem of zero compensation in industrial online measurement can be effectively overcome. Moreover, based on the functional correlation between the Lorentz force and the parameter of the conductor to be measured, a method of the probes moving variably and actively and their data difference ratio processing was adopted, so as to achieve dynamic calibration during online measurement. This measurement strategy provides a new approach for LFV to achieve online dynamic measurement and online calibration, and provides technical support for electromagnetic measurement technology towards engineering applications.

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Modeling and Tolerance Analysis of Compliant Mechanism for Axis-Symmetric Mass Comparator

Yoon,

Choi

2024

IEEE/ASME Trans. Mechatron.

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Torsion balance-based system for high-precision force measurement in horizontal plane: part II. Static and dynamic improvement

Cited by 4 publications

References 21 publications

Tip- and Laser-based 3D Nanofabrication in Extended Macroscopic Working Areas

Tip- and Laser-based 3D Nanofabrication in Extended Macroscopic Working Areas

A dynamic method for online measurement and calibrating with Lorentz force velocimetry

Modeling and Tolerance Analysis of Compliant Mechanism for Axis-Symmetric Mass Comparator

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