Torsional Harmonic Kelvin Probe Force Microscopy for High-Sensitivity Mapping of Surface Potential

Zhang, Hao; Gao, Haibo; Geng, Junyuan; Meng, Xianghe; Xie, Hui

doi:10.1109/tie.2021.3057040

Cited by 10 publications

(8 citation statements)

References 41 publications

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“…Figure 2(b,d,f) show the variation in the tip contribution ratio with an integral height for different tip−sample distances (10∼100 nm), revealing that the tip contribution is still highly dependent on the distance. 22,39 As z increases, the contribution of the tip gradually decreases. In addition, the tip contribution for the same integral height based on the OCP is relatively higher than that based on the commercial probe in both the AM-KPFM and FM-KPFM methods.…”

Section: ■ Results and Discussionmentioning

confidence: 99%

“…Kelvin probe force microscopy (KPFM) is gaining popularity as a powerful method for the simultaneous characterization of topography and SP. It utilizes the long-range electrostatic force between a probe and a sample as feedback to perform measurements that combine noncontact atomic force microscopy (AFM) and the Kelvin method based on the “nulling” concept. , The SP of the sample can be obtained form the contact potential difference (CPD) between the tip and sample directly acquired by KPFM, when the SP of the tip is known . Benefiting from its high spatial resolution, few environmental constraints, and good developability, KPFM has been applied in many fields such as biomolecules, , semiconductor materials, , optoelectronic devices, , and so forth.…”

Section: Introductionmentioning

confidence: 99%

“…20,21 The SP of the sample can be obtained form the contact potential difference (CPD) between the tip and sample directly acquired by KPFM, when the SP of the tip is known. 22 Benefiting from its high spatial resolution, few environmental constraints, and good developability, KPFM has been applied in many fields such as biomolecules, 23,24 semiconductor materials, 25,26 optoelectronic devices, 27,28 and so forth. For example, Sinensky et al adopted KPFM to analyze a protein/ DNA nanoarray, resolving three nucleotide mismatches with high resolution, sensitivity, and speed.…”

Section: ■ Introductionmentioning

confidence: 99%

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Three-Dimensional Kelvin Probe Force Microscopy

Geng

Zhang

Meng

et al. 2022

ACS Appl. Mater. Interfaces

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Traditional Kelvin probe force microscopy (KPFM) is mainly limited to the characterization of two-dimensional (2D) surfaces, and in situ surface potential (SP) imaging along 3D device surfaces remains a challenge. This paper presents a multimode 3D-KPFM based on an orthogonal cantilever probe (OCP) that can achieve SP mapping of 3D micronano structures. It integrates three working modes: a bending mode for 2D horizontal surface imaging, a torsion mode for vertical sidewall imaging, and a vector tracking-based 3D scanning mode. The customized OCP has a nanoscale tip protruding from the side and underside of the cantilever, rather than the front, and the extended tip makes the proposed approach universally applicable for 3D detection from the nanometer to micrometer scale. The spatial resolution of the proposed method is analyzed by simulation, which shows it can reduce the cantilever homogenization effect. Linearity and energy resolution measurements show that the proposed method has comparable performance to traditional methods. A comparative experiment using a gold−silicon interface verifies the accuracy of the reported method in its bending and torsion modes. Further, the imaging ability of the 3D scanning mode is confirmed in the 3D characterization of a step grating. This technique is applied to the in situ characterization of a microforce sensor with microcomb structures. The experiment results show that this method can excellently achieve the 3D quantitative characterization of topography and SP, including critical dimensions and SP along a 3D device surface. This novel 3D-KPFM technique has many potential applications in the further exploration of 3D micronano devices.

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Section: ■ Results and Discussionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: ■ Introductionmentioning

confidence: 99%

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Three-Dimensional Kelvin Probe Force Microscopy

Geng

Zhang

Meng

et al. 2022

ACS Appl. Mater. Interfaces

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“…Special tips can also be used to increase the resolution and sensitivity of KPFM in measuring surface potentials. [ 105 ] Second, improvement of AFM for adapting to a variety of environments and conditions of CE research. For example, Joseph reported on a multiscale functional imaging technique that used harmonic mixing that allowed for locally adjustable spatial resolution and can be applied to a wide range of nonuniform materials, devices, and interfaces.…”

Section: Discussionmentioning

confidence: 99%

Atomic Force Microscopy – A Powerful Tool for Studying Contact Electrification

Wang

Zhao

2022

Adv Materials Technologies

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“…KPFM Measurement: A torsional harmonic KPFM (TH-KPFM) based on a THC was used for the measurement of surface potential or piezoelectric potential. [57,58] The frequency of the electrostatic modulation was set to the first-order torsional resonance frequency (ω AC = 445.15 kHz, see Figure S1, Supporting Information) of the THC with an amplitude of 5 V (U AC ). The first-order bending eigenmode of the THC (ω m = 108.15 kHz, see Figure S1, Supporting Information) was used for the tip-sample distance control, and its mechanical amplitude was 50 nm (70% of its free oscillation amplitude).…”

Section: Methodsmentioning

confidence: 99%

In Situ Quantification of Strain‐Induced Piezoelectric Potential of Dynamically Bending ZnO Microwires

et al. 2023

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The piezoelectric properties of semiconductor micro/nanowires (M/NWs) are crucial for optimizing semiconductors’ electronic structure and carrier dynamics. However, the dynamic characterization of the piezoelectric properties of M/NWs remains challenging. Here, a Kelvin probe force microscopy technique based on a dual‐probe atomic force microscope is developed to achieve in situ piezoelectric potential measurements of dynamic bending MWs. This technique can not only characterize the surface potential on different crystal faces of ZnO MWs in a natural state through controllable axial rotation, but also investigate the piezoelectric potential of the dynamically bending flake‐like ZnO MW at different points and under different strain loads. The results show that the surface potentials of different faces/positions of the ZnO MWs are varied significantly, and determine that the quasi‐static conditions piezo‐strain factor of the flake‐like ZnO MW is 0.28 V/%, while the factor was 0.14 V/% under low‐frequency (⩽5 Hz) sinusoidal strain loading. This work provides a significant methodology to further study piezoelectric materials, and it aims to facilitate their applications in piezoelectric devices and systems.

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Torsional Harmonic Kelvin Probe Force Microscopy for High-Sensitivity Mapping of Surface Potential

Cited by 10 publications

References 41 publications

Three-Dimensional Kelvin Probe Force Microscopy

Three-Dimensional Kelvin Probe Force Microscopy

Atomic Force Microscopy – A Powerful Tool for Studying Contact Electrification

In Situ Quantification of Strain‐Induced Piezoelectric Potential of Dynamically Bending ZnO Microwires

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